Semiconductor device
First Claim
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1. A semiconductor device, comprising:
- a substrate;
a gate structure disposed on the substrate, wherein the gate structure comprises a high-k dielectric layer, wherein the high-k dielectric layer is U-shaped;
a first seal layer disposed on a sidewall of the gate structure, wherein the first seal layer is an oxygen-free seal layer and a first spacer, and is non-L-shaped; and
a second seal layer disposed on a sidewall of the first spacer, wherein the second seal layer comprises a material different from the first seal layer, and the second seal layer comprises an L-shaped seal layer.
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Abstract
A semiconductor device is disclosed. The semiconductor device includes: a substrate; a gate structure disposed on the substrate, wherein the gate structure comprises a high-k dielectric layer; and a first seal layer disposed on a sidewall of the gate structure, wherein the first seal layer is an oxygen-free seal layer.
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Citations
10 Claims
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1. A semiconductor device, comprising:
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a substrate; a gate structure disposed on the substrate, wherein the gate structure comprises a high-k dielectric layer, wherein the high-k dielectric layer is U-shaped; a first seal layer disposed on a sidewall of the gate structure, wherein the first seal layer is an oxygen-free seal layer and a first spacer, and is non-L-shaped; and a second seal layer disposed on a sidewall of the first spacer, wherein the second seal layer comprises a material different from the first seal layer, and the second seal layer comprises an L-shaped seal layer. - View Dependent Claims (2, 3, 4, 5)
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6. A method for fabricating semiconductor device, comprising:
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providing a substrate; forming a gate structure on the substrate; forming a first seal layer on a sidewall of the gate structure, wherein the first seal layer is an oxygen-free seal layer and a first spacer, and is non-L-shaped; forming a lightly doped drain in the substrate adjacent to two sides of the gate structure; forming a L-shaped second seal layer on a sidewall of the first spacer, wherein the L-shaped second seal layer comprises a material different from the first seal layer; and forming a U-shaped high-k dielectric layer in the gate structure. - View Dependent Claims (7, 8, 9)
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10. A semiconductor device, comprising:
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a substrate; a gate structure disposed on the substrate, wherein the gate structure comprises a high-k dielectric layer, wherein the high-k dielectric layer is U-shaped; a first seal layer disposed on a sidewall of the gate structure, wherein the first seal layer is an oxygen-free seal layer non-L-shaped; and a second seal layer disposed on a sidewall of the first seal layer, wherein the second seal layer comprises a material different from the first seal layer and the second seal layer is L-shaped.
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Specification