Illumination optical system, exposure apparatus, and device manufacturing method
First Claim
1. An illumination optical system which illuminates an irradiated plane with illumination light provided from a light source, the illumination optical system comprising:
- a spatial light modulator which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position;
a detection unit which detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator, with the detection unit including a light receiving surface which receives some of the illumination light;
a control unit which controls the spatial light modulator based on the light intensity distribution detected by the detection unit;
an information acquisition unit which acquires information on the light intensity distribution at the pupil position of the illumination optical system or the position optically conjugated with the pupil position; and
an optical path branching member which is arranged in an optical path between the spatial light modulator and the irradiated plane, with the optical path branching member branching off some of the illumination light from the optical path and guiding the branched off light to the information acquisition unit,wherein the control unit corrects the controlling executed by the control unit based on the light intensity distribution at the pupil position of the illumination optical system or the position optically conjugated with the pupil position that is acquired by the information acquisition unit.
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Accused Products
Abstract
An illumination optical system which illuminates an irradiated plane with illumination light provided from a light source includes a spatial light modulator which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position. A detection unit detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator. The detection unit includes a light receiving surface which receives some of the illumination light. A control unit controls the spatial light modulator based on the light intensity distribution detected by the detection unit.
121 Citations
59 Claims
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1. An illumination optical system which illuminates an irradiated plane with illumination light provided from a light source, the illumination optical system comprising:
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a spatial light modulator which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position; a detection unit which detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator, with the detection unit including a light receiving surface which receives some of the illumination light; a control unit which controls the spatial light modulator based on the light intensity distribution detected by the detection unit; an information acquisition unit which acquires information on the light intensity distribution at the pupil position of the illumination optical system or the position optically conjugated with the pupil position; and an optical path branching member which is arranged in an optical path between the spatial light modulator and the irradiated plane, with the optical path branching member branching off some of the illumination light from the optical path and guiding the branched off light to the information acquisition unit, wherein the control unit corrects the controlling executed by the control unit based on the light intensity distribution at the pupil position of the illumination optical system or the position optically conjugated with the pupil position that is acquired by the information acquisition unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 32, 36)
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21. An illumination optical system which illuminates an irradiated plane with illumination light provided from a light source, the illumination optical system comprising:
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a spatial light modulator which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position; a detection unit which detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator, with the detection unit including a light receiving surface which receives some of the illumination light; a control unit which controls the spatial light modulator based on the light intensity distribution detected by the detection unit; and an information acquisition unit which acquires information on the light intensity distribution at the pupil position of the illumination optical system or the position optically conjugated with the pupil position; wherein the control unit corrects the controlling executed by the control unit based on the light intensity distribution at the pupil position of the illumination optical system or the position optically conjugated with the pupil position that is acquired by the information acquisition unit, wherein the detection unit detects a position on the light receiving surface at which the illumination light falls; wherein the control unit controls the spatial light modulator based on the position on the light receiving surface at which the illumination light falls, wherein the detection unit includes an incidence angle detection unit which detects incidence angle of the illumination light entering the spatial light modulator; and wherein the control unit controls the spatial light modulator based on the incidence angle detected by the incidence angle detection unit. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 34, 38)
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33. An illumination optical system which illuminates an irradiated plane with illumination light provided from a light source, the illumination optical system comprising:
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a spatial light modulator tor which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position; a detection unit which detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator, with the detection unit including a light receiving surface which receives some of the illumination light; and a control unit which controls the spatial light modulator based on the light intensity distribution detected by the detection unit, wherein the detection unit includes an incidence angle detection unit which detects incidence angle of the illumination light entering the spatial light modulator, wherein the control unit controls the spatial light modulator based on the incidence angle detected by the incidence angle detection unit. - View Dependent Claims (35, 37)
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39. An exposure apparatus which transfers a predetermined pattern onto a photosensitive substrate, the exposure apparatus comprising:
an illumination optical system which illuminates an irradiated plane with illumination light provided from a light source, the illumination optical system comprising; a spatial light modulator which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position; a detection unit which detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator, with the detection unit including a light receiving surface which receives some of the illumination light; and a control unit which controls the spatial light modulator based on the light intensity distribution detected by the detection unit. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58)
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59. An illumination optical system which illuminates an irradiated plane with illumination light provided from a light source and is used in an exposure apparatus which transfers a predetermined pattern onto a photosensitive substrate, the illumination optical system comprising:
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a spatial light modulator which is arranged in an optical path of the illumination optical system and cooperates with part of the illumination optical system to form a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position; a detection unit which detects the light intensity distribution of the illumination light at a position in an optical path extending from the light source to the spatial light modulator, with the detection unit including a light receiving surface which receives some of the illumination light; and a control unit which controls the spatial light modulator based on the light intensity distribution detected by the detection unit.
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Specification