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MEMS actuator alignment

  • US 8,521,017 B2
  • Filed: 04/04/2011
  • Issued: 08/27/2013
  • Est. Priority Date: 11/15/2010
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • disposing a plurality of radially extending tabs around an outer periphery of an actuator device;

    disposing a corresponding plurality of pairs of raised mounting features on a front surface of an adjacent component that is separate from the actuator device, each pair of the raised mounting features defining a slot having sidewalls that are complementary in configuration to respective sidewalls of corresponding ones of the tabs; and

    inserting respective ones of the tabs on the actuator device into corresponding ones of the slots in the adjacent component.

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