Self-sensing array of microcantilevers for chemical detection

• US 8,524,501 B2
• Filed: 01/16/2012
• Issued: 09/03/2013
• Est. Priority Date: 10/17/2003
• Status: Active Grant

• Current Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Original Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Inventors: Adams, Jesse D.
• Primary Examiner(s): Menon, Krishnan S
• Assistant Examiner(s): Fritchman, Rebecca M
• Application Number:
  US13/350,921
• Publication Number:
  US 20120115757A1
• Time in Patent Office: 596 Days
• Field of Search: 422/88, 506/39, 73/241, 438/694, 436/22
• US Class Current: 436/22
• CPC Class Codes: G01N 2291/014 Resonance or resonant frequency
• CPC Class Codes: G01N 2291/018 Impedance
• CPC Class Codes: G01N 2291/0255 (Bio)chemical reactions, e.g. on biosensors
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/0257 with a layer containing at least one organic compound
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 2291/106 one or more transducer arrays
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves
• CPC Class Codes: G01N 29/4418 with a model, e.g. best-fit, regression analysis
• CPC Class Codes: G01N 29/46 by spectral analysis, e.g. Fourier analysis or wavelet analysis spectral signal processing per se G06F17/14
• CPC Class Codes: G01N 33/0009 General constructional details of gas analysers, e.g. portable test equipment G01N1/22 takes precedence
• CPC Class Codes: G01N 33/54366 Apparatus specially adapted for solid-phase testing
• CPC Class Codes: G01N 33/54373 involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
• CPC Class Codes: G01Q 10/045 Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
• CPC Class Codes: G01Q 60/24 AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

Abstract

The invention provides a chemical detection system for detecting at least one target chemical species, including a self-sensed cantilevered probe array having a plurality of self-sensed cantilevered probes, at least one chemical-sensitive coating material applied to at least one cantilevered probe in the cantilevered probe array, and an interface circuit that is coupled to the cantilevered probe array. At least one cantilevered probe in the cantilevered probe array exhibits a shifted cantilevered probe response when the cantilevered probe array is exposed to the target chemical species and the interface circuit actuates the cantilevered probe. A handheld chemical detection system and a method of operation are also disclosed.

Claims

1. A chemical analysis system for detecting, identifying, and/or characterizing at least one target chemical species, comprising:

a frequency-differentiated cantilevered probe array comprising a plurality of cantilevered probes, each cantilevered probe comprising;

a piezoelectric layer including a piezoelectric material that drives and senses the motion of the cantilevered probe;

a treated section, wherein the treated sections of the plurality of cantilevered probes are different from one another and include a chemical-sensitive coating material;

a first electrode electrically coupled to the piezoelectric layer; and

a second electrode electrically coupled to the piezoelectric layer;

a first electrical lead electrically coupled to a first electrode of at least one of the plurality of cantilevered probes and in electrical communication with the first electrode of each of the plurality of cantilevered probes;

a second electrical lead electrically coupled to a second electrode of at least one of the plurality of cantilevered probes and in electrical communication with the second electrode of each of the plurality of cantilevered probes;

an interface circuit electrically coupled to the first and second electrical leads and configured to actuate the cantilevered probes;

a sensing circuit electrically coupled to the first and second electrical leads; and

wherein the cantilevered probes are actuated when, through the first and second leads, a drive voltage is applied to the piezoelectric layer by the interface circuit thus generating an electrical response transmitted to the sensing circuit and at least one cantilevered probe in the array exhibits a shifted electrical response when the cantilevered probe array is exposed to the target chemical species.

2. The chemical analysis system of claim 1 wherein the first and second electrodes of the plurality of cantilevered probes are electrically coupled to one another, the plurality of cantilevered probes thus being connected in series to the first and second leads.

3. The chemical analysis system of claim 1 wherein the cantilevered probe array comprises a network of series-connected and parallel-connected cantilevered probes electrically connected to a pair of cantilevered probe array drive pads.

4. The chemical analysis system of claim 1 wherein the interface circuit comprises an adjustable frequency generator that is scanned through a predetermined frequency range.

5. The chemical analysis system of claim 1 wherein the interface circuit comprises an impedance analyzer that is scanned through a resonant frequency of the at least one cantilevered probe in the cantilevered probe array.

6. The chemical analysis system of claim 1 wherein the interface circuit comprises an oscillator circuit operating at a resonant frequency of the at least one cantilevered probe in the cantilevered probe array.

7. The chemical analysis system of claim 1 wherein the interface circuit comprises an oscillator circuit operating at a predetermined frequency, wherein the predetermined frequency is off-resonance with respect to the at least one cantilevered probe in the cantilevered probe array.

8. The chemical analysis system of claim 1 wherein the interface circuit comprises an impulse circuit for applying an electrical impulse to the cantilevered probe array.

9. The chemical analysis system of claim 1 wherein the interface circuit includes a fast Fourier transform generator to perform a fast Fourier transform on the shifted cantilevered probe response.

10. The chemical analysis system of claim 1 wherein the interface circuit detects a shifted electrical response from the at least one actuated cantilevered probe.

11. The chemical analysis system of claim 10 wherein the shifted electrical response comprises one of a shifted resonant frequency, a shifted Q factor, a shifted impedance, and a shifted deflection amplitude.

12. The chemical analysis system of claim 1 further comprising:

a controller in communication with the interface circuit;

wherein the controller receives a shifted electrical response from a set of cantilevered probes in the cantilevered probe array, and wherein the target chemical species is determined based on the shifted electrical response.

13. The chemical analysis system of claim 1 further comprising:

a controller in communication with the interface circuit;

wherein the controller receives a shifted electrical response from a set of cantilevered probes in the cantilevered probe array, and wherein the target chemical species is determined based on a comparison between the shifted electrical response and a reference set of electrical responses.

14. The chemical analysis system of claim 13 wherein the reference set of electrical responses comprises measured responses from known exposure conditions.

15. The chemical analysis system of claim 1 wherein the chemical-sensitive coating material comprises a coating applied through a mask disposed on a portion of the at least one cantilevered probe.

16. The chemical analysis system of claim 1 wherein the chemical-sensitive coating material comprises a non-homogeneous coating material applied to a set of cantilevered probes in the cantilevered probe array.

17. The chemical analysis system of claim 1 further comprising:

a reference cantilevered probe in the cantilevered probe array, wherein the reference cantilevered probe provides a reference electrical response when the cantilevered probe array is exposed to the target chemical species.

18. The chemical analysis system of claim 1 further comprising:

a species attraction electrode disposed on the at least one cantilevered probe in the cantilevered probe array to allow application of a species attraction potential.

19. The chemical analysis system of claim 1, wherein a resistive heater is coupled to at least one cantilevered probe in the cantilevered probe array and the chemical detection system further comprises a heater circuit electrically coupled to the resistive heater.

20. A chemical analysis system for detecting, identifying, and/or characterizing at least one target chemical species, comprising:

a frequency-differentiated cantilevered probe array comprising a plurality of cantilevered probes, each cantilevered probe comprising;

a piezoelectric layer including a piezoelectric material that drives and senses the motion of the cantilevered probe;

a treated section, wherein the treated sections of the plurality of cantilevered probes are different from one another and include a chemical-sensitive coating material;

a first electrode electrically coupled to the piezoelectric layer; and

a second electrode electrically coupled to the piezoelectric layer;

a first electrical lead electrically coupled to a first electrode of each of the plurality of cantilevered probes and in electrical communication with the first electrode of each of the plurality of cantilevered probes;

a second electrical lead electrically coupled to a second electrode of each of the plurality of cantilevered probes and in electrical communication with the second electrode of each of the plurality of cantilevered probes, wherein the first and second leads thus are connected in parallel to the plurality of cantilevered probes;

an interface circuit electrically coupled to the first and second electrical leads and configured to actuate the cantilevered probes;

a sensing circuit electrically coupled to the first and second electrical leads; and

wherein the cantilevered probes are actuated when, through the first and second leads, a drive voltage is applied to the piezoelectric layer by the interface circuit thus generating an electrical response transmitted to the sensing circuit and at least one cantilevered probe in the array exhibits a shifted electrical response when the cantilevered probe array is exposed to the target chemical species.