Electrostatic chuck

• US 8,525,418 B2
• Filed: 03/30/2006
• Issued: 09/03/2013
• Est. Priority Date: 03/31/2005
• Status: Active Grant

• Current Assignee: Niterra Co., Ltd.
• Original Assignee: NGK Spark PLUG Company Limited
• Inventors: Morita, Naotoshi, Kameyama, Ryosuke
• Primary Examiner(s): JENNISON, BRIAN W
• Application Number:
  US11/392,768
• Publication Number:
  US 20060221539A1
• Time in Patent Office: 2,714 Days
• Field of Search: 219/390, 219/405, 219/411, 219/444.1, 219/460.1, 219/461.1, 219/468.1, 392/416, 392/418, 118/724, 118/725
• US Class Current: 315/111.21
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H01L 21/6831 using electrostatic chucks

Abstract

An electrostatic chuck including a metal base having a through hole; a ceramic body covering the through hole; a suction electrode provided in the ceramic body; and a heating element provided in the ceramic body. A projection region defined by projecting the through hole toward the ceramic body is differentiated from an outer region which is determined by magnifying the projection region at a similarity ratio of three while setting an areal center of gravity of the projection region as a center of similarity, but excluding an interior of the projection region. Furthermore, the heating element is arranged such that a heating value per unit area in the projection region is 50% or less of a heating value per unit area in the outer region.

Claims

1. An electrostatic chuck comprising:

a metal base having at least one through hole;

a ceramic body covering said through hole;

a suction electrode provided in said ceramic body; and

a heating element provided in said ceramic body, wherein

a heating value per unit area in a projection region of each of said at least one through hole is 50% or less of a heating value per unit area in an outer region, wherein said projection region is a region defined by projecting said through hole toward said ceramic body, and said outer region is a region determined by magnifying said projection region at a similarity ratio of three while setting an areal center of gravity of said projection region as a center of similarity, but excluding an interior of said projection region and wherein

a lower surface of said ceramic body covers said at least one through hole and said ceramic body comprises;

a concave portion formed in the lower surface of said ceramic body and in communication with said at least one through hole of said metal base, wherein an upper end of said concave portion is at a position that is lower than that of the heating element;

a metallization layer formed in said concave portion;

a conductive pattern connected to said metallization layer; and

a via penetrating through a portion of said ceramic body and connecting said heating element and said conductive pattern.

2. The electrostatic chuck as claimed in claim 1, wherein

said heating element is formed from substantially the same material, and has substantially the same thickness and substantially the same width in both said projection region and said outer region, and

a per unit area of said heating element in the projection region of each of said at least one through hole is 50% or less of a per unit area of said heating element in said outer region.

4. The electrostatic chuck as claimed in claim 1, wherein said heating element linearly extends in a lateral direction, said heating element in the vicinity of said projection region has a substantially U-like shape, and a convex side of the U-like shape faces said projection region.

6. The electrostatic chuck as claimed in claim 1, wherein said heating element is spaced apart from said projection region by 1 mm or more.

8. The electrostatic chuck as claimed in claim 1, wherein said ceramic body is integrated with said metal base.

10. The electrostatic chuck as claimed in claim 1, wherein said ceramic body comprises alumina.

12. The electrostatic chuck as claimed in claim 1, wherein said at least one through hole of said metal base has an inner diameter larger than an inner diameter of said concave portion of said ceramic body.

14. The electrostatic chuck as claimed in claim 1, wherein said concave portion is a columnar concave portion having a central axis aligned with said through hole.

3. An electrostatic chuck comprising:

a metal base having at least one through hole;

a ceramic body covering said through hole;

a suction electrode provided in said ceramic body; and

a heating element provided in said ceramic body,

wherein said heating element is not present in a projection region of each of said at least one through hole defined by projecting said through hole toward said ceramic body and wherein

a lower surface of said ceramic body covers said at least one through hole and said ceramic body comprises;

a concave portion formed in the lower surface of said ceramic body and in communication with said at least one though hole of said metal base, wherein an upper end of said concave portion is at a position that is lower than that of the heating element;

a metallization layer formed in said concave portion;

a conductive pattern connected to said metallization layer, and

a via penetrating through a portion of said ceramic body and connecting said heating element and said conductive pattern.

5. The electrostatic chuck as claimed in claim 3, wherein said heating element linearly extends in a lateral direction, said heating element in the vicinity of said projection region has a substantially U-like shape, and a convex side of the U-like shape faces said projection region.

7. The electrostatic chuck as claimed in claim 3, wherein said heating element is spaced apart from said projection region by 1 mm or more.

9. The electrostatic chuck as claimed in claim 3, wherein said ceramic body is integrated with said metal base.

11. The electrostatic chuck as claimed in claim 3, wherein said ceramic body comprises alumina.

13. The electrostatic chuck as claimed in claim 3, wherein said at least one through hole of said metal base has an inner diameter larger than an inner diameter of said concave portion of said ceramic body.

15. The electrostatic chuck as claimed in claim 3, wherein said concave portion is a columnar concave portion having a central axis aligned with said through hole.