Capacitive micromachined ultrasonic transducer with voltage feedback
First Claim
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1. A system comprising:
- a capacitive micromachined ultrasonic transducer (CMUT) comprising;
a first electrode;
a second electrode separated from the first electrode by a gap so that a first capacitance exists between the first electrode and the second electrode;
a spring element supporting the second electrode for enabling the second electrode to move toward and away from the first electrode; and
a feedback component connected in series with the CMUT, the feedback component providing a feedback on a voltage applied to the CMUT.
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Abstract
Implementations of a capacitive micromachined ultra-sonic transducer (CMUT) include a feedback component connected in series with the CMUT. The feedback component applies a feedback on a voltage applied on the CMUT for affecting the voltage applied on the CMUT as a capacitance of the CMUT changes during actuation of the CMUT.
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Citations
20 Claims
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1. A system comprising:
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a capacitive micromachined ultrasonic transducer (CMUT) comprising; a first electrode; a second electrode separated from the first electrode by a gap so that a first capacitance exists between the first electrode and the second electrode; a spring element supporting the second electrode for enabling the second electrode to move toward and away from the first electrode; and a feedback component connected in series with the CMUT, the feedback component providing a feedback on a voltage applied to the CMUT. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method comprising:
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providing a capacitive micromachined ultrasonic transducer (CMUT) including a first electrode and a second electrode separated from the first electrode by a space so that a first capacitance exists between the first electrode and the second electrode, the electrode being supported by a spring element for enabling the second electrode to move toward the first electrode and return toward an original position, wherein there is a first capacitance between the first electrode and the second electrode; and placing a feedback capacitor in series with the CMUT, the feedback capacitor having a second capacitance based on the first capacitance between the first electrode and the second electrode of the CMUT. - View Dependent Claims (15, 16, 17, 18)
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19. A system comprising:
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a capacitive micromachined ultrasonic transducer (CMUT) comprising; a first electrode; a second electrode separated from the first electrode by a gap so that a first capacitance exists between the first electrode and the second electrode when the second electrode is in a first position; and a flexible element supporting the second electrode for enabling the second electrode to move from the first position toward the first electrode for a predetermined displacement when a voltage is applied and return to the first position for producing acoustic energy; and a feedback capacitor connected in series with the CMUT, the feedback capacitor having a second capacitance between 10 and 300 percent of the first capacitance, wherein the feedback capacitor and the CMUT form a voltage divider so that an increase of the first capacitance of the CMUT decreases the voltage applied on the CMUT as the feedback capacitor provides a negative feedback on the voltage applied on the CMUT. - View Dependent Claims (20)
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Specification