Method and system for managing process jobs in a semiconductor fabrication facility

• US 8,527,080 B2
• Filed: 10/02/2008
• Issued: 09/03/2013
• Est. Priority Date: 10/02/2008
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Assaf, Shay, Babu, Venkatesh, Flores, Robert D., Hickey, Brendan, Kuttannair, Krishna, Park, Song J., Wang, Chongyang Chris, Rhee, Adrian
• Primary Examiner(s): Ali, Mohammad
• Assistant Examiner(s): Rao, Sheela S
• Application Number:
  US12/244,735
• Publication Number:
  US 20100087941A1
• Time in Patent Office: 1,797 Days
• Field of Search: 700/121, 700/100, 700/101, 700/102, 718/103, 718/104, 718/105
• US Class Current: 700/101
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling

Abstract

A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.

Claims

1. A computer-implemented method for managing process jobs in semiconductor fabrication, the method comprising:

receiving a plurality of process jobs associated with one or more priorities of fabrication processing;

ordering with a queue the plurality of process jobs in an order reflecting the one or more priorities of fabrication processing associated with the plurality of process jobs;

executing a current process job selected from the plurality of process jobs in the queue based on the order reflecting the one or more priorities of fabrication processing;

upon receiving, in real time, a new process job with a priority of fabrication processing higher than the one or more priorities of fabrication processing associated with the plurality of process jobs, modifying, in real time, the order reflecting the priorities of fabrication processing to place the new process job ahead of the plurality of process jobs in the queue; and

executing the new process job upon completion of execution of the current process job based on the modified order.

2. The method of claim 1, wherein each process job is associated with a recipe for processing a substrate of a processing lot.

3. The method of claim 1, wherein the priorities are assigned by a user through a host system.

4. The method of claim 1, further comprising:

receiving the new process job with a higher priority; and

placing the new process job in the queue ahead of process jobs with lower priorities or no priority and behind process jobs with higher priorities.

5. The method of claim 1, wherein each process job is associated with a control job, and the new process job is executed after an execution of a current control job is completed, wherein the control job includes a plurality of process jobs and only the process jobs with a higher priority are placed ahead of existing process jobs in the queue.

6. The method of claim 1, wherein executing a current process job selected from the plurality of process jobs comprises:

selecting the current process job from the queue sorted according to the one or more priorities;

checking if a processing resource is available for the current process job in the queue;

sending out a notice that the current process job is to be performed when the processing resource is available;

receiving a confirmation in response to the notice; and

starting to perform the current process job.

7. A computer-implemented method for managing process jobs in semiconductor fabrication, the method comprising:

checking a plurality of process jobs to determine whether one or more priorities of fabrication processing are associated with the plurality of process jobs;

preparing job information including the priorities of fabrication processing; and

sending out the job information for the plurality of process jobs to be executed in an order reflecting the priorities of fabrication processing, wherein the order is modified in real time when a new process job with a priority higher than the priorities of the plurality of process jobs is added to be executed to place the new process job ahead of the plurality of process jobs in a queue such that the new process job is executed upon completion of a currently executing process based on the modified order.

8. The method of claim 7, wherein each process job is associated with a recipe for processing a substrate.

9. The method of claim 7, wherein the priorities are assigned by a user through a host computer.

10. The method of claim 7, further comprising:

receiving a request for a confirmation to execute a next process job; and

sending out the confirmation for an execution of the next process job.

11. A system for managing process jobs in semiconductor fabrication, the system comprising:

a queue to queue process jobs; and

a real-time sequencer, coupled to the queue, to receive a plurality of process jobs associated with one or more priorities of fabrication processing, to order with the queue the plurality of process jobs in an order reflecting the one or more priorities of fabrication processing associated with the plurality of process jobs, to execute a current process job selected from the plurality of process jobs in the queue based on the order reflecting the one or more priorities of fabrication processing, to modify, in real time, the order reflecting the priorities of fabrication processing to place the new process job ahead of the plurality of process jobs in the queue upon receiving, in real time, a new process job with a priority higher than the one or more priorities of fabrication processing associated with the plurality of process jobs, and to execute the new process job upon completion of execution of the current process job based on the modified order.

12. The system of claim 11, wherein the real-time sequencer is to receive the new process job with a higher priority, and to place the new process job in the queue ahead of process jobs with lower priorities or no priority and behind process jobs with higher priorities.

13. The system of claim 11, wherein each process job is associated with a control job, and the real-time sequencer is to execute the new process job after an execution of a current control job is completed, wherein the control job includes a plurality of process jobs and only the process jobs with a higher priority are placed ahead of existing process jobs in a queue.

14. The system of claim 11, wherein the real-time sequencer is to check if processing resource is available for a next process job in the queue, to send out a notice that the next process job is to be executed when the processing resource is available, to receive a confirmation in response to the notice, and to execute the next process job.

15. The system of claim 11 further comprising:

a front-end subsystem, coupled to the real-time sequencer, to check the plurality of process jobs, to determine whether one or more priorities are associated with the plurality of process jobs, to prepare job information regarding the plurality of process jobs and the priorities, and to send out the job information to the real-time sequencer.

16. The system of claim 14, wherein the front-end subsystem is further to receive the notice, to determine whether the next process job is to be executed, and to send out the confirmation upon determining that the next process job is to be executed.

17. A non-transitory computer-readable storage medium storing instructions that when executed by a computer, cause the computer to perform a method for managing process jobs in semiconductor fabrication, the method comprising:

receiving a plurality of process jobs associated with one or more priorities of fabrication processing; and

ordering with a queue the plurality of process jobs in an order reflecting the one or more priorities of fabrication processing associated with the plurality of process jobs;

executing a current process job selected from the plurality of process jobs in the queue based on the order reflecting the one or more priorities of fabrication processing;

upon receiving, in real time, a new process job with a priority higher than the one or more priorities of fabrication processing associated with the plurality of process jobs, modifying, in real time, the order reflecting the priorities of fabrication processing to place the new process job ahead of the plurality of process jobs in the queue; and

executing the new process job upon completion of execution of the current process job based on the modified order.

18. The non-transitory computer-readable storage medium of claim 17, wherein the method further comprises:

receiving the new process job with a higher priority; and

placing the new process job in the queue ahead of process jobs with lower priorities or no priority and behind process jobs with higher priorities.

19. The non-transitory computer-readable storage medium of claim 17, wherein each process job is associated with a control job, and the new process job is executed after an execution of a current control job is completed, wherein the control job includes a plurality of process jobs including a process job with a higher priority, wherein all of the process jobs associated with the control job are placed ahead of existing process jobs in the queue.

20. The non-transitory computer-readable storage medium of claim 17, wherein executing a current process job selected from the plurality of process jobs comprises:

selecting the current process job from the queue sorted according to the one or more priorities;

checking if a processing resource is available for the current process job in the queue;

sending out a notice that the current process job is to be performed when the processing resource is available;

receiving a confirmation in response to the notice; and

starting to perform the current process job.