Probe detection system

• US 8,528,110 B2
• Filed: 06/08/2009
• Issued: 09/03/2013
• Est. Priority Date: 06/06/2008
• Status: Active Grant

• Current Assignee: Infinitesima Limited
• Original Assignee: Infinitesima Limited
• Inventors: Humphris, Andrew
• Primary Examiner(s): IPPOLITO, NICOLE MARIE
• Application Number:
  US12/996,512
• Publication Number:
  US 20110167525A1
• Time in Patent Office: 1,548 Days
• Field of Search: 850/1, 850/2, 850/3, 850/4, 850/5, 850/7, 356/28.5, 356/450
• US Class Current: 850/6
• CPC Class Codes: G01B 11/0608 Height gauges
• CPC Class Codes: G01B 2290/45 Multiple detectors for detecting interferometer signals
• CPC Class Codes: G01Q 10/065 Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
• CPC Class Codes: G01Q 20/02 by optical means

Abstract

A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.

Claims

1. A detection system for use with a scanning probe microscope, the system comprising a light source for generating a beam to illuminate a probe comprising a cantilever with base and free ends, the free end supporting a sharp tip, collecting means for collecting light reflected from the probe wherein the beam illuminates an upper surface of the probe in the vicinity of its tip, and the reflected light comprises two components:

a first component from which an indication of the deflection of the upper surface of the probe is obtained and a second component for transmission to a height detection system arranged to extract from this component information relating to the position of the upper surface of the probe relative to a reference point.

2. A detection system according to claim 1 wherein the height detection system comprises an interferometer arranged to detect the path difference between the second component of reflected light and a height reference beam.

3. A detection system according to claim 2 wherein the interferometer includes a means for generating a pair of phase quadrature interferograms.

4. A detection system according to claim 3 wherein the system includes fringe counting apparatus arranged to produce an output dependent on a number of fringes detected at each interferogram.

5. A detection system according to claim 4 wherein the fringe counting apparatus includes fringe subdividing apparatus.

6. A detection system according to claim 3 wherein the means for generating a pair of phase quadrature interferograms is a beamsplitter with phase-splitting coating.

7. A detection system according to claim 2 wherein the first component is also transmitted to the interferometer, the interferometer being further arranged to detect an optical path difference between the first component of reflected light and a deflection reference beam which propagates along an optical path whose length is defined by a position on the cantilever remote from its free end, thereby providing information as to the deflection of the cantilever.

8. A detection system according to claim 7 wherein the position on the cantilever remote from its free end is the cantilever base end.

9. A detection system according to claim 1 wherein the first component is transmitted to a deflection detector, the deflection detector being arranged to provide the indication of the deflection of the upper surface of the probe.

10. A detection system according to claim 9 wherein the deflection detector is a second interferometer, the second interferometer being arranged to detect an optical path difference between the first component of reflected light and a deflection reference beam which propagates along an optical path whose length is defined by a position on the cantilever remote from its free end.

11. A detection system according to claim 10 wherein the position on the cantilever remote from its free end is the cantilever base end.

12. A detection system according to claim 9 wherein the deflection detector is a split photodiode oriented such that the first component of reflected light is incident on two parts of the diode with relative intensity determined by an angle of orientation of the upper surface of the probe.

13. A detection system according to claim 1 the system including a beamsplitter arranged to separate the reflected light into the first and second components.

14. A detection system according to claim 1 wherein the probe comprises a tip mounted near the free end of the cantilever, the cantilever being supported at its base end, and wherein the upper surface of the probe that is illuminated by the beam is above the tip.

15. A detection system according to claim 1 wherein the probe includes an actuator that is operable to move its tip.

16. A scanning probe microscope for imaging a sample in accordance with an interaction between the sample and a probe, the microscope comprising driving means arranged to provide relative motion between the probe and the sample surface and a probe detection system in accordance with claim 1.

17. A scanning probe microscope in accordance with claim 16 wherein the driving means comprises an xy scanner arranged to provide relative motion between the probe and the sample surface in a plane substantially parallel to the sample surface and a z driver arranged to provide relative motion in a direction perpendicular to the sample surface.

18. A scanning probe microscope in accordance with claim 17 wherein the indication of the deflection of the upper surface of the probe obtained from the probe detection system is included in a feedback system incorporating the z driver, wherein the z driver is arranged to return the indication of the angle of orientation of the probe to a set level.

19. A scanning probe microscope in accordance with claim 18 wherein the z driver includes a base driver that is arranged to move the base of the probe.

20. A scanning probe microscope in accordance with claim 19 wherein the z driver also includes an actuator that is integral with the probe, the actuator being operable to move the tip of the probe.

21. A scanning probe microscope in accordance with claim 18 wherein the feedback system operates on a timescale longer than that taken by the xy scanner to move the probe between image pixels.

22. A scanning probe microscope according to claim 18 wherein the xy scanner comprises a resonator arranged to oscillate either the probe or sample plus support at or near its resonant frequency.

23. A method of detecting light reflected from an upper surface of a scanning probe, the method including locating a point on the upper surface that is directly above the probe tip followed by directing a light beam on the upper surface at a point directly above a probe tip, collecting light reflected from the upper surface and directing it to a height detector arranged to form an image indicative of the height of the probe tip above a reference level. wherein the step of locating the point on the upper surface includes the steps of:

(a) directing light onto the upper surface;

(b) oscillating the probe about its tip so as to change the angle of the upper surface;

(c) monitoring the output of the height detector;

(d) changing the position of the point on the upper surface at which the light is incident; and

(e) repeating steps (c) and (d) until variations apparent in the output of the height detector as a result of tilting the probe are minimised.

24. A method of detecting light reflected from an upper surface of a scanning probe, the method including locating a point on the upper surface that is directly above the probe tip followed by directing a light beam on the upper surface at a point directly above a probe tip, collecting light reflected from the upper surface and directing it to a height detector arranged to form an image indicative of the height of the probe tip above a reference level, wherein the probe comprises a cantilever held at its base end and supporting the tip at or near its free end, the upper surface of the probe that is illuminated by the beam being at or near the cantilever free end, and wherein the step of locating the point on the upper surface includes the steps of:

(a) directing light onto the upper surface of the cantilever

(b) moving the base of the cantilever vertically whilst maintaining the tip in a fixed position so as to change the angle of orientation of the cantilever;

(c) monitoring the output of the height detector;

(d) changing the position of the point on the upper surface at which the light is incident; and

(e) repeating steps (c) and (d) until variations apparent in the output of the height detector as a result of moving the base of the probe are minimised.

25. A method according to claim 24 wherein a feedback signal is obtained from an indication of probe orientation, the feedback signal being such as to cause an adjustment of base height such that the probe is returned to a pre-set orientation and wherein the step of moving the base of the cantilever vertically is achieved by varying the pre-set orientation.

26. A method of detecting light reflected from an upper surface of a scanning probe, the method including locating a point on the upper surface that is directly above the probe tip followed by a step of directing a light beam on the upper surface at a point directly above a probe tip, collecting light reflected from the upper surface and directing it to a height detector arranged to form an image indicative of the height of the probe tip above a reference level, and wherein the step of locating the point on the upper surface includes the steps of:

(a) directing light onto the upper surface;

(b) displacing the probe tip by a known distance;

(c) monitoring the output of the height detector;

(d) changing the position of the point on the upper surface at which the light is incident; and

repeating steps (c) and (d) until the output of the height detector corresponds to that expected for the known displacement.

27. A method according to claim 26 wherein Step (b) comprises scanning the probe across a sample of known height variation.

28. A method of detecting light reflected from an upper surface of a scanning probe, the method including locating a point on the upper surface that is directly above the probe tip followed by a step of directing a light beam on the upper surface at a point directly above a probe tip, collecting light reflected from the upper surface and directing it to a height detector arranged to form an image indicative of the height of the probe tip above a reference level, wherein the step of locating the point on the upper surface includes the steps of:

(a) directing light onto the upper surface;

(b) scanning the probe at a speed sufficient to excite transient motion thereof;

(c) monitoring the output of the height detector;

(d) changing the position of the point on the upper surface at which the light is incident; and

(e) repeating steps (c) and (d) until variations apparent in the output of the height detector as a result of transient motion are minimised.

29. A method of detecting light reflected from an upper surface of a scanning probe, the method including the step of directing a light beam on the upper surface at a point directly above a probe tip, collecting light reflected from the upper surface and directing it to a height detector arranged to form an image indicative of the height of the probe tip above a reference level, wherein the scanning probe comprises a cantilever with a base and a free end, the free end supporting a sharp tip, and is part of a scanning probe microscope that incorporates a detection system comprising a light source for generating the light beam to illuminate the scanning probe, and a collecting means for collecting light reflected from the scanning probe, wherein the reflected light comprises two components:

a first component from which an indication of a deflection of the upper surface of the scanning probe is obtained and a second component for directing to the height detector.

30. A method of collecting data using a scanning probe microscope, the method comprising the steps of:

(a) moving a probe comprising a cantilever with base and free ends, the free end supporting a sharp tip, into close proximity with a sample surface;

(b) directing a light beam on an upper surface of the probe at a point directly above the tip; and

(c) scanning the probe across the sample surface whilst collecting and analysing light reflected from the upper surface of the probe, a z driver being operative to drive the base of the probe vertically in response to a feedback signal obtained by analysis of a first component of the collected light, from which is obtained an indication of the deflection of the upper surface of the probe and wherein a second component of collected light is transmitted to an interferometer arranged to detect the path difference between this component and a height reference beam and arranged to form an image indicative of the height of the probe tip above a reference level.