Micromechanical component having a volume-elastic medium

• US 8,528,402 B2
• Filed: 02/22/2012
• Issued: 09/10/2013
• Est. Priority Date: 11/29/2007
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Ratzel, Wolf-Ingo, Ohl, Christian, Kurle, Juergen
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US13/402,626
• Publication Number:
  US 20120144915A1
• Time in Patent Office: 566 Days
• Field of Search: 734/93, 735/140.1, 735/141.4, 737/56
• US Class Current: 73/493
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 3/0078 Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
• CPC Class Codes: B81B 7/0077 Other packages not provided for in groups B81B7/0035 - B81B7/0074
• CPC Class Codes: G01P 1/023 for acceleration measuring devices

Abstract

A method for manufacturing a micromechanical component is described, the micromechanical component having a medium. The medium has settable and changeable volume-elastic properties and generally completely encloses a sensor module and/or a module housing. The medium preferably has a low-pass response.

Claims

1. A micromechanical component, comprising:

a housing;

a sensor module positioned in the housing; and

a volume-elastic medium enclosing completely the sensor, the medium having a frequency filtering response, and the medium being pre-tensioned.

2. The micromechanical component as recited in claim 1, wherein the medium comprises a first medium and a second medium, the first medium having at least one of different chemical properties or different physical properties, than the second medium.

3. The micromechanical component as recited in claim 2, wherein at least one of the first medium and the second medium have bubbles.

4. The micromechanical component as recited in claim 1, wherein the medium fills up all intermediate spaces between the sensor module and the external housing in the micromechanical component.

5. The micromechanical component as recited in claim 1, wherein the sensor is a pressure sensor.

6. The micromechanical component as recited in claim 1, wherein the sensor is an acceleration sensor.

7. A micromechanical component, comprising:

an external housing;

a sensor module;

a module housing enclosing the sensor module, the module housing being positioned in the external housing; and

a volume-elastic medium completely enclosing the module housing, the medium having a frequency filtering response, and the medium being pre-tensioned.