Substrate processing apparatus and method

• US 8,528,499 B2
• Filed: 03/27/2009
• Issued: 09/10/2013
• Est. Priority Date: 03/27/2008
• Status: Active Grant

• Current Assignee: Eugene Technology Co., Ltd.
• Original Assignee: Eugene Technology Co., Ltd.
• Inventors: Je, Sung-Tae, Yang, Il-Kwang, Park, Chan-Yong
• Primary Examiner(s): STARK, JARRETT J
• Application Number:
  US12/934,419
• Publication Number:
  US 20110028001A1
• Time in Patent Office: 1,628 Days
• Field of Search: 118/719, 118/715, 118/723.MW, 118/723.MR, 118/723.ME, 118/723.AN, 156/345.36, 156/345.41, 156/345.42, 435/758, 257/E21.482
• US Class Current: 118/723.R
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow

Abstract

Disclosed is a substrate processing apparatus and method. The substrate processing apparatus includes a process chamber (10) providing an internal space, in which a process is carried out onto a substrate; a support member (30) installed in the process chamber (10) to support the substrate; and a shower head (20) located above the support member (30) to supply a source gas toward the support member (30), wherein the shower head (20) includes a first injection surface (24) located at a position separated from the upper surface of the substrate by a first distance, and provided with outlets of first injection holes (24a) to inject the source gas; and a second injection surface (26) located at a position separated from the upper surface of the substrate by a second distance being different from the first distance, and provided with outlets of second injection holes (26a) to inject the source gas.

Claims

1. A substrate processing method, in which a source gas is supplied to a substrate disposed on a support member, a heater being installed in the support member, to deposit a film on a surface of the substrate, the method comprising:

depositing a dummy film using a flat-type shower head installed above the support member on a dummy substrate, the flat-type shower head having a plurality of injection holes and outlets of the injection holes having a substantially uniform height, and the injection holes supplying the source gas toward the support member;

measuring thickness distribution of the dummy film; and

depositing a film on a substrate using a non-flat-type shower head that is installed above the support member and has a plurality of first injection holes and a plurality of second injection holes, outlets of the second injection holes being positioned to be closer to the substrate than outlets of the first injection holes, and the first injection holes and the second injection holes supplying the source gas toward the support member,

wherein the second injection holes are positioned to a part corresponding to a relatively thicker region of the dummy film than other regions of the dummy film and the first injection holes are positioned to the other regions of the dummy film.

2. A method for manufacturing a shower head injecting a source gas toward a surface of a substrate for depositing a film on the surface of the substrate, the substrate being disposed on a support member in which a heater is installed, the method comprising:

depositing a dummy film using a flat-type shower head installed above the support member on a dummy substrate, the flat-type shower head including a flat-type injection surface that has a substantially uniform height and a plurality of injection holes formed in the flat-type injection surface, and the injection holes supplying the source gas toward the support member;

measuring thickness distribution of the dummy film;

manufacturing a non-flat-type shower head being installed above the support member and including a first injection surface and a second injection surface, the first injection surface and the second injection surface having different heights, and the second injection surface being positioned to be closer to a substrate than the first injection surface; and

forming a plurality of first injection holes and a plurality of second injection holes on the first injection surface and the second injection surface for supplying the source gas toward the support member, respectively,

wherein the second injection surface has a shape that corresponds to a relatively thicker region of the dummy film than other regions of the dummy film.

3. The method according to claim 2, wherein the second injection surface has a circular ring shape.

4. The method according to claim 2, wherein the second injection surface has a rectangular ring shape.

5. A method for manufacturing a shower head injecting a source gas toward a surface of a substrate for depositing a film on the surface of the substrate, the substrate being disposed on a support member in which a heater is installed, the method comprising:

depositing a dummy film using a flat-type shower head installed above the support member on a dummy substrate, the flat-type shower head having a plurality of injection holes and outlets of the injection holes having, a substantially uniform height, and the injection holes supplying the source gas toward the support member;

measuring thickness distribution of the dummy film; and

manufacturing a non-flat-type shower head being installed above the support member and having a plurality of first injection holes and a plurality of second injection holes for supplying the source gas toward the support member, outlets of the second injection holes being positioned to be closer to a substrate than outlets of the first injection holes,

wherein the second injection holes are positioned to correspond to a relatively thicker region of the dummy film than other regions of the dummy film.