Multi-stage spring system

• US 8,528,885 B2
• Filed: 04/21/2008
• Issued: 09/10/2013
• Est. Priority Date: 04/21/2008
• Status: Expired due to Fees

• Current Assignee: FormFactor Incorporated
• Original Assignee: FormFactor Incorporated
• Inventors: Yao, Jun Jason
• Primary Examiner(s): NGUYEN, XUAN LAN T
• Application Number:
  US12/106,369
• Publication Number:
  US 20090261517A1
• Time in Patent Office: 1,968 Days
• Field of Search: 267/160, 267/158, 267/165, 267/185, 439/66
• US Class Current: 267/160
• CPC Class Codes: F16F 3/02 with springs made of steel or of other material having low internal friction
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 1/18 with subsequent sliding
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

Embodiments of a multi-stage spring system are provided herein. In some embodiments, a multi-stage spring system includes a spring assembly having at least one resilient element, wherein the spring assembly has a first spring constant when deflected up to a first distance, a greater, second spring constant when deflected beyond the first distance and up to a second distance, and a greater, third spring constant when deflected beyond the second distance and up to a third distance, and wherein the spring assembly stores mechanical energy when deflected towards a contact surface that biases the spring assembly away from the contact surface when released.

Claims

1. A multiple-stage spring system, comprising:

a spring assembly comprising a first resilient element comprising a cantilevered beam with a free end, a second resilient element comprising a cantilevered beam with a free end, and a third resilient element extending from the first resilient element and having a contact end for contacting a contact surface, wherein;

there is a first gap between the first resilient element and the second resilient element,

there is a second gap between the contact end of the third resilient element and the contact surface, and

the spring assembly has a first spring constant when the first resilient element is deflected up to a first distance through the first gap bringing the first resilient element into contact with the second resilient element, a greater, second spring constant when the first resilient element is further deflected beyond the first distance and up to a second distance causing the third resilient element to move through the second gap such that the contact end of the third resilient element contacts the contact surface, and a greater, third spring constant when the first resilient element is still further deflected beyond the second distance after the contact end of the third resilient element contacts the contact surface and up to a third distance, and wherein the spring assembly stores mechanical energy that biases the spring assembly away from the contact surface when released.

2. The system of claim 1, further comprising:

a stop configured to limit the deflection of the spring assembly.

3. The system of claim 1, further comprising an actuator coupled to the spring assembly.

4. The system of claim 3, wherein the actuator is an electrostatic actuator.

5. The system of claim 3, wherein the actuator comprises at least one of a comb drive or a gap closing actuator.

6. The system of claim 3, wherein the actuator comprises an angled gap closing actuator, a partitioned MEMS actuator, or a multi-stage actuator.

7. The system of claim 3, wherein the spring assembly stores mechanical energy that corresponds to the force applied by the actuator.

8. The system of claim 1, wherein the resilient element comprises silicon.

9. The system of claim 1, wherein the contact end of the third resilient element comprises a tip configured to wipe the contact surface upon continued deflection of the first resilient element after the contact end contacts the contact surface.

10. The system of claim 9, wherein the tip comprises a metal.

11. The system of claim 9, wherein the tip comprises at least one of copper, aluminum, gold, rhodium, or palladium.

12. The system of claim 9, wherein the tip is configured to contact two contact surfaces disposed in a spaced apart relation.

13. The system of claim 12 further comprising:

a mechanism for facilitating rotation of the tip upon contact with the two contact surfaces.

14. The system of claim 13, wherein the mechanism comprises at least one of a hinge, a flexure, or a spring.

15. The system of claim 12, wherein the two contact surfaces and the tip are electrically conductive and at least partially define an electrical switch.

16. The system of claim 1, wherein at least one of the first spring constant is substantially constant for deflection of the first resilient element over the first distance, the second spring constant is substantially constant for deflection of the first resilient element from the first distance to the second distance, and the third spring constant is substantially constant for deflection of the first resilient element from the second distance to the third distance.

17. The system of claim 1, wherein:

the first spring constant is a spring constant of the first resilient element,

the second spring constant is a combination of the spring constant of the first resilient element and a spring constant of the second resilient element, and

the second spring constant is greater than the first spring constant.

18. The system of claim 17, wherein:

the third spring constant is a combination of the spring constant of the first resilient element, the spring constant of the second resilient element, and a spring constant of the third resilient element, and

the third spring constant is greater than the second spring constant.

19. The system of claim 18, wherein:

the first resilient element but not the second resilient element or the third resilient element deflects when the first resilient element deflects up to the first distance,

the second resilient element but not the third resilient element deflects when the first resilient element deflects beyond the first distance up to the second distance, and

the third resilient element deflects when the first resilient element deflects beyond the second distance up to the third distance.

20. The system of claim 1, wherein

at least one of the first resilient element, the second resilient element, and the third resilient element is a linear spring, and

at least another of the first resilient element, the second resilient element, and the third resilient element is a non-linear spring.

21. The system of claim 1, wherein the cantilevered beam of the first resilient element, the cantilevered beam of the second resilient element, and the contact surface are substantially parallel.

22. The system of claim 21, wherein the third resilient element extends from the first resilient element at an angle that is neither substantially parallel nor substantially perpendicular to the first resilient element, the second resilient element, or the contact surface.