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Method for attaching a first carrier device to a second carrier device and micromechanical components

  • US 8,530,260 B2
  • Filed: 04/12/2010
  • Issued: 09/10/2013
  • Est. Priority Date: 04/14/2009
  • Status: Active Grant
First Claim
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1. A method for attaching a first carrier device to a second carrier device, comprising:

  • forming a recess in a first exterior of a first carrier device;

    filling the recess with at least one of a first bond layer and a first solder layer so that a contacting side of that at least one of the first bond layer and the first solder layer facing away from the first carrier device has an indentation, wherein the at least one of the first bond layer and the first solder layer includes a first cover area at least partially covering the first exterior of the first carrier device, and wherein a partial surface of the first exterior of the first carrier device is framed by the at least one of the first bond layer and the first solder layer;

    placing the first carrier device having the at least one of the first bond layer and the first solder layer on the second carrier device in such a way that a first contact area of the at least one of the first bond layer and the first solder layer contacts a second contact area of the second carrier device; and

    one of fixedly bonding or fixedly soldering the first carrier device to the second carrier device;

    wherein the at least one of the first bond layer and the first solder layer is formed in such a way that the first cover area is shaped larger than the first contact area.

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