Probe card test apparatus and method

• US 8,531,202 B2
• Filed: 10/10/2008
• Issued: 09/10/2013
• Est. Priority Date: 10/11/2007
• Status: Expired due to Fees

• Current Assignee: Veraconnex LLC
• Original Assignee: Veraconnex LLC
• Inventors: Mok, Sammy, Swiatowiec, Frank, Agahdel, Fariborz
• Primary Examiner(s): Nguyen, Tung X
• Application Number:
  US12/682,391
• Publication Number:
  US 20100213960A1
• Time in Patent Office: 1,796 Days
• Field of Search: 32476201-7621, 32475401-7543, 32475501-75511
• US Class Current: 324/762.03
• CPC Class Codes: G01R 31/2889 Interfaces, e.g. between probe and tester G01R31/31905 and G01R1/07364 take precedence
• CPC Class Codes: G01R 35/00 Testing or calibrating of apparatus covered by the other groups of this subclass

Abstract

A probe card analyzer mounts on a probe card in a wafer prober and a use a fixture in the wafer probe and switch electronics in place of an ATE head. Methods of testing can confirm that probe cards are operating within their specifications over large temperature ranges and the mechanical force ranges seen in real manufacturing environments. This reduces the cost and improves the accuracy and speed of analyzing probe cards and improves diagnosing problems with probe cards.

Claims

1. A system for analyzing properties of a probe card, the system comprising:

a wafer prober in which the probe card is placed;

switch electronics electrically connected to the probe card;

a measurement unit electrically connected to the switch electronics, wherein the measurement unit comprises a 4-wire resistance meter that performs measurements through four measurement rails, and wherein the measurement unit through the switch electronics is able to perform measurements of a probe that the switch electronics selects from among a plurality of probes on the probe card; and

a fixture that is held on a wafer stage in the wafer prober and brought into contact with the probe card by the wafer prober.

2. The system of claim 1, wherein the switch electronics contains switches electrically connecting the probe card to the measurement unit such that each electrical channel on the probe card can be selectively connected to any of the four measurement rails of the measurement unit.

3. The system of claim 2, wherein the switch electronics controls a pattern of on/off states of the switches to change the on/off states in synchronization with measurements taken by the measurement unit such that a next pattern is loaded while a previous pattern is being used by the measurement unit and the next pattern is applied when a previous measurement is complete and a next measurement is initiated.

4. The system of claim 1, wherein the measurement unit consists of a single measuring device.

5. The system of claim 1, wherein the switch electronics comprise one or more switch matrix cards, with each switch matrix card having one or more DUT connectors matching ATE connectors on the probe card.

6. The system of claim 5, wherein the DUT connectors on the switch matrix cards are connected directly to the ATE connectors on the probe card.

7. The system of claim 5, wherein each of the switch matrix cards comprises a controller.

8. The system of claim 1, wherein the switch electronics comprises a plurality of substantially identical switch matrix cards that are connected to the probe card.

9. The system of claim 1, further comprising a manipulator system that holds and supports the switch electronics.

10. The system of claim 9, wherein the manipulator system applies a load to the probe card to emulate mechanical deflections caused when an ATE test head is connected to the probe card during wafer probing.

11. The system of claim 1, wherein the fixture comprises a wafer with an unpatterned conductive surface that the wafer prober brings into contact with the probes on the probe card.

12. The system of claim 1, wherein the fixture comprises a wafer with a conductive film having a pattern.

13. The system of claim 12, wherein the pattern of the conductive film includes a field region and one or more pads, each of the pads being surrounded by an isolation region except where a trace connects the pad to the field region.

14. The system of claim 13, wherein the measurement unit measures one probe that is in contact with one of the pads using a return path through another probe in the probe card that is in contact with the field region.

15. The system of claim 1, wherein the fixture comprises a wafer with a conductive film having a pattern that comprises a plurality of pads and traces, wherein the pads are in positions that correspond to positions of the probes on the probe card, and each of the pads that correspond to bussed probes is electrically coupled through one of the traces to one of the pads corresponding to non-bussed probes.

16. The system of claim 1, wherein the fixture comprises:

a wafer; and

a substrate mounted on the wafer, wherein the substrate has a size matching one or more die sites of the probe card and has a conductive metal pattern on an exposed surface such that there are metal pads matching the probes on the probe card, wherein the pads matching bussed probes are electrically connected to pads matching non-bussed probes.

17. The system of claim 1, wherein the fixture comprises an isolation probe card, wherein the isolation probe card has isolation probes placed facing the probes on the probe card and in a pattern that matches a pattern of the probes on the probe card for one or more die sites, and the fixture is mounted in the wafer prober such that the isolation probes can be brought into contact with the probes on the probe card.

18. The system of claim 1, wherein the switch electronics comprises:

a switch matrix connected between the measurement unit and test channels of the probe card; and

control resources including one or more controllers capable of driving integrated circuits embedded on the probe card;

wherein

the switch matrix is operable to connect the control resources to one or more of the test channels, whereby one or more of the test channels can be converted into control channels.

19. A system for analyzing properties of a probe card, the system comprising:

a wafer prober in which the probe card is placed;

switch electronics electrically connected to the probe card, wherein the switch electronics comprises a plurality of substantially identical switch matrix cards that are connected to the probe card, and wherein each of the switch matrix cards stores a board ID representing a position of the switch matrix card position on the probe card, the board ID being initialized by software and a single wire connection between adjacent switch matrix cards;

a measurement unit electrically connected to the switch electronics, wherein the measurement unit through the switch electronics is able to perform measurements of a probe that the switch electronics selects from among a plurality of probes on the probe card; and

a fixture that is held on a wafer stage in the wafer prober and brought into contact with the probe card by the wafer prober.

20. A system for analyzing properties of a probe card, the system comprising:

a wafer prober in which the probe card is placed;

switch electronics electrically connected to the probe card, wherein the switch electronics comprise one or more switch matrix cards, with each switch matrix card having one or more DUT connectors matching ATE connectors on the probe card, and wherein the switch electronics further comprises one or more daughter card connectors allowing the one or more daughter cards to electrically connect to the one or more switch matrix cards and electrically connect to the DUT connector pins on the one or more switch matrix cards to which those daughter cards are connected;

a measurement unit electrically connected to the switch electronics, wherein the measurement unit through the switch electronics is able to perform measurements of a probe that the switch electronics selects from among a plurality of probes on the probe card; and

a fixture that is held on a wafer stage in the wafer prober and brought into contact with the probe card by the wafer prober.

21. The system of claim 20, wherein each daughter card contains resources that can be selectively connected to the DUT connector pins.

22. The system of claim 21, wherein the resources are configurable to control integrated circuits and relays on the probe card or provide power and ground to the probe card.

23. A system for diagnostic measurement of a probe card, the system comprising:

a wafer prober in which the probe card is placed;

switch electronics electrically connected to the probe card;

a measurement unit electrically connected to the switch electronics, wherein the measurement unit through the switch electronics is able to perform measurements of a probe that the switch electronics selects from among a plurality of probes on the probe card; and

a diagnostic probe containing one or more probe tips, the diagnostic probe being mounted on a chuck stage of the wafer prober;

wherein the diagnostic probe can be moved laterally and vertically relative to the probe card to bring the diagnostic probe tip into contact with any desired location on the probe card including probe tips on the probe card, terminals of components on the probe card and electrical contacts on the probe card.

24. The system of claim 23, wherein the probe tips of the diagnostic probe can be electrically connected to measurement rails of the measurement unit so that the test channels selected for measurement can include the diagnostic probe as one of the test channels.

25. The system of claim 23, further comprising a second measurement unit electrically connected to the probe tips of the diagnostic probe.