Pivotable MEMS device

• US 8,531,752 B2
• Filed: 10/26/2011
• Issued: 09/10/2013
• Est. Priority Date: 01/15/2008
• Status: Active Grant

• Current Assignee: Lumentum Operations, LLC (Lumentum Holdings Inc.)
• Original Assignee: JDS Uniphase Corporation (Lumentum Holdings Inc.)
• Inventors: Moidu, Abdul Jaleel K.
• Primary Examiner(s): CHERRY, EUNCHA P
• Application Number:
  US13/281,475
• Publication Number:
  US 20120281266A1
• Time in Patent Office: 685 Days
• Field of Search: 359/198.1, 3592231-2261, 359/290, 359/291, 359/871, 359/872
• US Class Current: 359/225.1
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0043 Increasing angular deflection
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G09G 2300/0426 Layout of electrodes and connections
• CPC Class Codes: G09G 3/346 based on modulation of the reflection angle, e.g. micromirrors micromirrors devices per se G02B26/0833

Abstract

A tiltable MEMS device is disclosed having an asymmetric, electrostatically actuated tiltable platform and a reflector mounted on the platform so that the platform is hidden below the reflector, except for a portion of long side of the platform extending from under the reflector. An electrostatic stator actuator is mounted on the substrate under the long side of the tiltable platform. The range of a unidirectional tilt is increased by providing a recess in the substrate under the extended portion of the platform to accommodate the increased range of movement of the tiltable platform.

Claims

1. A micro-electro-mechanical device comprising:

a substrate;

a pivoting structure comprising;

a tiltable platform disposed over the substrate, pivotable about a first axis substantially parallel to the substrate, wherein the tiltable platform is asymmetric about the first axis, having a long side extending in a first direction perpendicular to the first axis and a short side extending a shorter distance than the long side in a second, opposite direction;

a pedestal extending upwardly from the tiltable platform; and

a reflector mounted on the pedestal, the reflector extending over the short side and a first portion of the long side of the tiltable platform, wherein a second portion of the long side of the tiltable platform extends from under the reflector;

wherein the pivoting structure has a center of gravity on or directly above the first axis;

a first support for supporting the tiltable platform over the substrate;

a first hinge structure defining the first axis, extending between the first support and the tiltable platform; and

a first electrode structure including a first electrode mounted on the substrate under the long side of the tiltable platform, for tilting the pivoting structure about the first axis.

2. The micro-electro-mechanical device of claim 1, wherein the first hinge structure comprises a pair of torsional hinges extending from opposite sides of the tiltable platform, and wherein the first support comprises a pair of posts extending from the substrate on the opposite sides of the tiltable platform and receiving the ends of the torsional hinges.

3. The micro-electro-mechanical device of claim 1, further comprising a covering structure mounted on the substrate proximate to the long side of the tiltable platform, the covering structure having an overhang section disposed over the second portion of the long side of the tiltable platform.

4. The micro-electro-mechanical device of claim 1, wherein the reflector has a center of gravity on or directly above the first axis, and the tiltable platform has a center of gravity on or directly above the first axis.

5. The micro-electro-mechanical device of claim 4, wherein the pedestal is disposed on or directly above the first axis.

6. The micro-electro-mechanical device of claim 1, wherein the pedestal extends from the reflector at the reflector'"'"'s geometrical center.

7. The micro-electro-mechanical device of claim 1, wherein the tiltable platform includes a counterweight element extending downwardly therefrom, so that a center of gravity of the pivoting structure is disposed substantially on the first axis.

8. The micro-electro-mechanical device of claim 1, wherein the first electrode structure includes only the first electrode, whereby the micro-electro-mechanical device is absent an electrode mounted under the short side of the tiltable platform.

9. The micro-electro-mechanical device of claim 8, wherein the first electrode comprises a comb electrode including a plurality of comb fingers spaced apart along a direction perpendicular to the first axis, wherein the long side of the tiltable platform comprises a plurality of openings for interdigitating with the comb fingers of the first electrode.

10. The micro-electro-mechanical device of claim 9, wherein the platform is tiltable during use through an angular range, so that at least some of the comb fingers extend completely through the corresponding openings in the tiltable platform.

11. The micro-electro-mechanical device of claim 1, wherein the reflector is an elongate flat mirror.

12. The micro-electro-mechanical device of claim 1, wherein the first hinge structure comprises first torsional hinges extending from opposite sides of the tiltable platform, wherein the first support comprises a gimbal for pivoting about a second axis perpendicular to the first axis, surrounding the tiltable platform and receiving the ends of the first torsional hinges, the micro-electro-mechanical device further comprising:

second torsional hinges defining the second axis, extending from opposite sides of the gimbal;

a pair of second supports on the substrate on the opposite sides of the gimbal and receiving the ends of the second torsional hinges; and

a second electrode mounted on the substrate, for pivoting the gimbal, the tiltable platform, and the reflector about the second axis.

13. The micro-electro-mechanical device of claim 12, wherein the pivoting structure has a center of gravity on or directly above the second axis.

14. The micro-electro-mechanical device of claim 12, further comprising a covering structure mounted on the substrate proximate to the long side of the tiltable platform, the covering structure having an overhang section disposed over the second portion of the long side of the tiltable platform extending from under the reflector.

15. The micro-electro-mechanical device of claim 12, wherein the pedestal is disposed on or directly above the first and the second axes of tilt.

16. The micro-electro-mechanical device of claim 15, wherein the tiltable platform includes a counterweight element extending downwardly therefrom, so that a center of gravity of the pivoting structure is disposed substantially on the first and the second axes of tilt.

17. The micro-electro-mechanical device of claim 12, wherein the first electrode is a comb electrode having a plurality of comb fingers spaced apart along the second axis, wherein the long side of the tiltable platform comprises a plurality of openings for interdigitating with the comb fingers of the first electrode.

18. The micro-electro-mechanical device of claim 17, wherein the second electrode is a comb stator electrode, wherein the gimbal comprises a comb rotor electrode interdigitated with the comb stator electrode.

19. The micro-electro-mechanical device of claim 18, wherein the comb stator electrode comprises a plurality of comb fingers spaced apart along the second axis.

20. The micro-electro-mechanical device of claim 12, wherein the reflector is an elongate flat mirror.