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Pivotable MEMS device

  • US 8,531,752 B2
  • Filed: 10/26/2011
  • Issued: 09/10/2013
  • Est. Priority Date: 01/15/2008
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical device comprising:

  • a substrate;

    a pivoting structure comprising;

    a tiltable platform disposed over the substrate, pivotable about a first axis substantially parallel to the substrate, wherein the tiltable platform is asymmetric about the first axis, having a long side extending in a first direction perpendicular to the first axis and a short side extending a shorter distance than the long side in a second, opposite direction;

    a pedestal extending upwardly from the tiltable platform; and

    a reflector mounted on the pedestal, the reflector extending over the short side and a first portion of the long side of the tiltable platform, wherein a second portion of the long side of the tiltable platform extends from under the reflector;

    wherein the pivoting structure has a center of gravity on or directly above the first axis;

    a first support for supporting the tiltable platform over the substrate;

    a first hinge structure defining the first axis, extending between the first support and the tiltable platform; and

    a first electrode structure including a first electrode mounted on the substrate under the long side of the tiltable platform, for tilting the pivoting structure about the first axis.

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