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Extension-mode angular velocity sensor

  • US 8,534,127 B2
  • Filed: 09/11/2009
  • Issued: 09/17/2013
  • Est. Priority Date: 09/11/2009
  • Status: Active Grant
First Claim
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1. An angular rate sensor comprising:

  • a base;

    at least three substantially planar masses disposed substantially in a plane parallel to and above the base, the at least three substantially planar masses move in an extension mode;

    wherein in the extension mode the at least three substantially planar masses move in the plane simultaneously away or simultaneously towards a point;

    wherein at least one of the at least three substantially planar masses moves along a different axis than the others of the at least three substantially planar masses; and

    an X-axis capacitive sensor including an electrode formed on the base;

    a Y-axis capacitive sensor including an electrode formed on the base;

    a Z-axis capacitive sensor including a moveable electrode attached to the at least one of the at least three substantially planar masses and a fixed electrode substantially parallel to the moveable electrode and in the plane;

    wherein the X-axis capacitive sensor, the Y-axis capacitive sensor, and the Z-axis capacitive sensor sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor.

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