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Electrochemical apparatus with barrier layer protected substrate

  • US 8,535,396 B2
  • Filed: 08/21/2009
  • Issued: 09/17/2013
  • Est. Priority Date: 08/09/2002
  • Status: Active Grant
First Claim
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1. A method of fabricating an electrochemical apparatus comprising the following steps:

  • (a) providing a metallic, a polymeric, or a doped or undoped silicon substrate with a first and a second side;

    (b) depositing a first barrier layer on said first side;

    (c) depositing a second barrier layer on said second side;

    (d) fabricating a first electrochemically active cell on said first side on a top surface of said first barrier layer, which chemically separates said first electrochemically active cell from said substrate, directly on the top surface of said first barrier layer;

    (e) fabricating a second electrochemically active cell on said second side on top of said second barrier layer, which chemically separates said second electrochemically active cell from said substrate;

    (f) composing said first barrier layer with a plurality of chemically different sublayers, said plurality of chemically different sublayers having at least one top sublayer at the top surface of said first barrier layer comprising electrically conducting material such that the top sublayer of the first barrier layer is one of a positive part of the electrochemical active cell and a negative part of the electrochemical active cell; and

    (g) composing said second barrier layer of a plurality of chemically different sublayers.

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