Low inertia frame for detecting coriolis acceleration
First Claim
1. A sensor responsive to motion comprising:
- a base;
a proof mass for generating a torque in response to motion of the sensor;
a sensing frame disposed in a plane coupled to the proof mass, where in the sensing frame moves in response to the torque, the sensing frame comprising;
a first rail, constrained to move along a first axis in the plane;
a second rail substantially parallel to the first rail, the second rail constrained to move along the first axis;
at least two guiding arms for ensuring the first rail and the second rail to move in anti-phase fashion along the first axis;
a first guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail;
a second guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail;
the first guiding arm flexibly suspended to the base at a first anchoring point allowing rotation of the first guiding arm around a second axis that is perpendicular to the first axis and normal to the plane;
the second guiding arm flexibly suspended to the base at a second anchoring point allowing rotation of the second guiding arm around the third axis parallel to the second axis; and
a transducer for sensing motion of the first and second rails along the first axis.
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Abstract
A sensing frame is disclosed. The sensing frame includes a first rail and a second rail. The first and second rails are constrained to move along a first axis parallel to the first and second rails. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. First and second guiding arms are flexibly coupled to the first rail and second rail. The first guiding arm is flexibly suspended to the base at first anchoring points for allowing rotation of the first guiding arm, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm. The sensing frame includes a plurality of coupling flexures and a transducer for sensing motion of the first and second rails.
246 Citations
10 Claims
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1. A sensor responsive to motion comprising:
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a base; a proof mass for generating a torque in response to motion of the sensor; a sensing frame disposed in a plane coupled to the proof mass, where in the sensing frame moves in response to the torque, the sensing frame comprising; a first rail, constrained to move along a first axis in the plane; a second rail substantially parallel to the first rail, the second rail constrained to move along the first axis; at least two guiding arms for ensuring the first rail and the second rail to move in anti-phase fashion along the first axis; a first guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail; a second guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail; the first guiding arm flexibly suspended to the base at a first anchoring point allowing rotation of the first guiding arm around a second axis that is perpendicular to the first axis and normal to the plane; the second guiding arm flexibly suspended to the base at a second anchoring point allowing rotation of the second guiding arm around the third axis parallel to the second axis; and a transducer for sensing motion of the first and second rails along the first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification