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Low inertia frame for detecting coriolis acceleration

  • US 8,539,835 B2
  • Filed: 03/22/2012
  • Issued: 09/24/2013
  • Est. Priority Date: 09/12/2008
  • Status: Active Grant
First Claim
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1. A sensor responsive to motion comprising:

  • a base;

    a proof mass for generating a torque in response to motion of the sensor;

    a sensing frame disposed in a plane coupled to the proof mass, where in the sensing frame moves in response to the torque, the sensing frame comprising;

    a first rail, constrained to move along a first axis in the plane;

    a second rail substantially parallel to the first rail, the second rail constrained to move along the first axis;

    at least two guiding arms for ensuring the first rail and the second rail to move in anti-phase fashion along the first axis;

    a first guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail;

    a second guiding arm flexibly coupled to the first rail and flexibly coupled to the second rail;

    the first guiding arm flexibly suspended to the base at a first anchoring point allowing rotation of the first guiding arm around a second axis that is perpendicular to the first axis and normal to the plane;

    the second guiding arm flexibly suspended to the base at a second anchoring point allowing rotation of the second guiding arm around the third axis parallel to the second axis; and

    a transducer for sensing motion of the first and second rails along the first axis.

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