Methods for manufacturing three-dimensional devices and devices created thereby

• US 8,540,913 B2
• Filed: 10/31/2007
• Issued: 09/24/2013
• Est. Priority Date: 06/05/2001
• Status: Active Grant

• Current Assignee: Rtx Corporation
• Original Assignee: Mikro Systems, Inc.
• Inventors: Appleby, Michael P., Fraser, Iain, Atkinson, James E.
• Primary Examiner(s): Tentoni, Leo B
• Application Number:
  US11/930,274
• Publication Number:
  US 20080053638A1
• Time in Patent Office: 2,155 Days
• Field of Search: 264/219, 264/318, 264/334
• US Class Current: 264/219
• CPC Class Codes: A61B 6/4258 for detecting non x-ray radiation, e.g. gamma radiation A61B6/037 takes precedence
• CPC Class Codes: A61B 6/502 for diagnosis of breast, i.e. mammography
• CPC Class Codes: B22D 19/00 Casting in, on, or around objects which form part of the product B22D23/04 takes precedence; alumino-thermic welding B23K23/00; coating by casting molten material on the substrate C23C6/00
• CPC Class Codes: B22D 29/00 Removing castings from moulds, not restricted to casting processes covered by a single main group; Removing cores; Handling ingots B22D13/10, B22D11/124, B22D17/00 take precedence
• CPC Class Codes: B23P 15/246 Laminated dies
• CPC Class Codes: B28B 7/20 Moulds for making shaped articles with undercut recesses, e.g. dovetails
• CPC Class Codes: B28B 7/24 Unitary mould structures with a plurality of moulding spaces , e.g. moulds divided into multiple moulding spaces by integratable partitions, mould part structures providing a number of moulding spaces in mutual co-operation assemblies of individually complete moulds B28B7/26
• CPC Class Codes: B29C 33/0088 Multi-face stack moulds
• CPC Class Codes: B29C 33/12 with incorporated means for positioning inserts, e.g. labels positioning reinforcements B29C70/541
• CPC Class Codes: B29C 33/302 Assembling a large number of mould elements to constitute one cavity
• CPC Class Codes: B29C 33/3842 Manufacturing moulds, e.g. shaping the mould surface by machining
• CPC Class Codes: B29C 33/42 characterised by the shape of the moulding surface, e.g. ribs or grooves
• CPC Class Codes: B29C 33/424 Moulding surfaces provided with means for marking or patterning for injection moulding B29C45/372
• CPC Class Codes: B29C 33/44 with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles
• CPC Class Codes: B29C 39/021 by casting in several steps
• CPC Class Codes: B29C 39/34 for undercut articles
• CPC Class Codes: B29C 39/36 Removing moulded articles
• CPC Class Codes: B29C 48/12 Articles with an irregular circumference when viewed in cross-section, e.g. window profiles
• CPC Class Codes: B29C 69/001 a shaping technique combined with cutting, e.g. in parts or slices combined with rearranging and joining the cut parts for reinforced material B29C70/545; B29C49/4278, B29C51/268 take precedence
• CPC Class Codes: B29K 2083/00 Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as moulding material
• CPC Class Codes: B29L 2031/756 : Microarticles, nanoarticles
• CPC Class Codes: G01T 1/20 : with scintillation detectors
• CPC Class Codes: G01T 7/00 : Details of radiation-measuring instruments
• CPC Class Codes: G03F 7/0017 : for the production of embossing, cutting or similar devices; for the production of casting means
• CPC Class Codes: G21K 1/02 : using diaphragms, collimators
• CPC Class Codes: Y10T 428/31 : Surface property or characteristic of web, sheet or block

Abstract

In certain exemplary embodiments of the present invention, three-dimensional micro-mechanical devices and/or micro-structures can be made using a production casting process. As part of this process, an intermediate mold can be made from or derived from a precision stack lamination and used to fabricate the devices and/or structures. Further, the micro-devices and/or micro-structures can be fabricated on planar or nonplanar surfaces through use of a series of production casting processes and intermediate molds. The use of precision stack lamination can allow the fabrication of high aspect ratio structures. Moreover, via certain molding and/or casting materials, molds having cavities with protruding undercuts also can be fabricated. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. This abstract is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Claims

1. A method of forming a casting, comprising:

filling a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers with a first casting material to form a first cast product having an aspect ratio of greater than 10;

1, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a sandwiched cavity, said stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut; and

demolding the first cast product from the mold, the first cast product reflecting the sandwiched cavity said first cast product comprising a plurality of product surfaces that define a periphery of a layer-less volume of said first cast product, a product surface from said plurality of product surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of metallic foil layers.

2. A method of forming a casting, comprising:

filling a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers with a first casting material to form a first cast product, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a feature having an aspect ratio greater than 25;

1, said stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut; and

demolding the first cast product from the mold, the first cast product reflecting the feature said first cast product comprising a plurality of product surfaces that define a periphery of a layer-less volume of said first cast product, a product surface from said plurality of product surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of metallic foil layers.

3. The method of claim 2, wherein:

the feature is an isotropic wall.

4. The method of claim 2, wherein:

the feature is a sub-cavity.

5. The method of claim 2, wherein:

the feature is a sub-cavity in fluid communication with an outer edge of a layer of the mold.

6. A method of forming a plurality of castings, comprising:

repetitively;

filling a mold having a stacked plurality of micro-machined foil layers with a first casting material to form a first cast product having an aspect ratio of greater than 10;

1, the stacked plurality of micro-machined foil layers defining a protruding undercut; and

demolding the first cast product from the mold without damage to either the first cast product or the mold.

7. The method of claim 6, wherein:

the first cast product reflects the protruding undercut.

8. The method of claim 6, wherein:

the micro-machined layers are lithographically-derived.

9. The method of claim 6, wherein:

the micro-machined layers are non-lithographically-derived.

10. The method of claim 6, wherein:

the micro-machined layers are formed via laser machining.

11. The method of claim 6, wherein:

the micro-machined layers are formed via ion etching.

12. The method of claim 6, wherein:

the micro-machined layers are formed via electroplating.

13. The method of claim 6, wherein:

the micro-machined layers are formed via vapor deposition.

14. The method of claim 6, wherein:

the micro-machined layers are formed via bulk micro-machining.

15. The method of claim 6, wherein:

the micro-machined layers are formed via surface micro-machining.

16. The method of claim 6, wherein:

the micro-machined layers are formed via conventional machining.

17. The method of claim 6, wherein:

the mold is reusable.

18. The method of claim 6, wherein:

the first cast product is demolded from the mold such that the mold is not substantially damaged.

19. A method of forming a casting, comprising:

without damage to either the first cast product or the mold, demolding a first cast product from a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers that define a feature having an aspect ratio greater than 25;

1, the first cast product reflecting the feature, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut.

20. A method of forming a casting, comprising:

without damage to either the first cast product or the mold, demolding a first cast product from a mold having a stacked plurality of micro-machined foil layers that define a protruding undercut and a feature having an aspect ratio of greater than 10;

1, the first case product reflecting the protruding undercut and the feature.