Method of guided non-line of sight coating
First Claim
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1. A method for applying a coating on substrate, the method comprising:
- placing the substrate into a chamber;
impinging an evaporant source in the chamber with a beam to generate an evaporated vapor cloud in the chamber; and
presenting a carrier gas stream to the chamber to disperse the evaporated vapor cloud;
deflecting the evaporated vapor cloud being moved by the carrier gas stream, wherein the deflecting is done with at least one vapor cloud modifier that disrupts a flow of the carrier gas stream that prevents an area of the substrate from being coated, and wherein the evaporated vapor cloud at least partially coats at the substrate.
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Abstract
A method for applying a vapor deposition coating onto a substrate with a non line of sight or limited line of sight is disclosed. A vapor stream is provided in a chamber that is below atmospheric pressure. The vapor stream is impinged with a working gas that provides a flow that transports the vapor stream. The flow of the working gas is modified with a physical object that directs the flow to achieve a desired coating on the substrate.
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Citations
11 Claims
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1. A method for applying a coating on substrate, the method comprising:
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placing the substrate into a chamber; impinging an evaporant source in the chamber with a beam to generate an evaporated vapor cloud in the chamber; and presenting a carrier gas stream to the chamber to disperse the evaporated vapor cloud; deflecting the evaporated vapor cloud being moved by the carrier gas stream, wherein the deflecting is done with at least one vapor cloud modifier that disrupts a flow of the carrier gas stream that prevents an area of the substrate from being coated, and wherein the evaporated vapor cloud at least partially coats at the substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for applying vapor deposition onto a substrate with a non line of sight or limited line of sight comprising:
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providing a vapor stream in a chamber, wherein the chamber is below atmospheric pressure; impinging the vapor stream with a working gas that provides a flow that transports the vapor stream; modifying a flow of the working gas with a physical object that directs the flow to achieve a desired coating on the substrate, wherein the physical object that directs the flow prevents an area of the substrate from being coated. - View Dependent Claims (8, 9, 10, 11)
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Specification