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Noise shielding techniques for ultra low current measurements in biochemical applications

  • US 8,541,849 B2
  • Filed: 02/14/2012
  • Issued: 09/24/2013
  • Est. Priority Date: 02/14/2012
  • Status: Active Grant
First Claim
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1. A device having an integrated noise shield, comprising:

  • a plurality of vertical shielding structures substantially surrounding a semiconductor device; and

    an opening above the semiconductor device substantially filled with a conductive fluid;

    wherein the plurality of vertical shielding structures and the conductive fluid shield the semiconductor device from ambient radiation.

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