Method and system for forming resonators over CMOS

• US 8,541,850 B2
• Filed: 12/12/2008
• Issued: 09/24/2013
• Est. Priority Date: 12/12/2008
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Gupta, Arun K., Barron, Lance W., McDonald, William C.
• Primary Examiner(s): Lee, Kyoung
• Application Number:
  US12/333,878
• Publication Number:
  US 20100148880A1
• Time in Patent Office: 1,747 Days
• Field of Search: None
• US Class Current: 257/415
• CPC Class Codes: H03H 2009/02322 Material
• CPC Class Codes: H03H 3/0073 Integration with other electronic structures
• CPC Class Codes: H03H 9/2426 in combination with other electronic elements

Abstract

In accordance with one embodiment of the present disclosure, a semiconductor substrate includes complementary metal-oxide-semiconductor (CMOS) circuitry disposed outwardly from the semiconductor substrate. An electrode is disposed outwardly from the CMOS circuitry. The electrode is electrically coupled to the CMOS circuitry. A resonator is disposed outwardly from the electrode. The resonator is operable to oscillate at a resonance frequency in response to an electrostatic field propagated, at least in part, by the electrode.

Claims

1. A method of forming a microelectromechanical system (MEMS) device, comprising:

forming a sacrificial layer over a substrate including one or more integrated circuits;

selectively patterning the sacrificial layer to form at least one gap;

forming a hinge layer over the patterned first sacrificial layer including within the at least one gap;

forming a bulk layer over the hinge layer including over the hinge layer within the at least one gap;

selectively patterning the bulk layer to define a resonator supported on the hinge layer and laterally spaced by at least one flexure portion of the hinge layer from at least one support post;

forming at least a portion of an electrode spaced from the resonator; and

removing remaining portions of the sacrificial layer, leaving the resonator supported by the at least one support post at the at least one flexure portion of the hinge layer;

whereby a changing electrostatic field generated by first and second electrical signals respectively communicated from the one or more integrated circuits to the electrode and to the resonator can drive an oscillation of the resonator at a resonance frequency along an axis.

2. The method of claim 1, further comprising forming a mask layer over the at least one flexure portion of the hinge layer prior to forming the bulk layer;

wherein the gap is a first gap; and

wherein selectively patterning the bulk layer includes forming a second gap down to the sacrificial layer to define an electrode portion of the bulk layer spaced from the resonator by the second gap.

3. The method of claim 2, wherein the sacrificial layer is a first sacrificial layer;

and further comprising forming a second sacrificial layer over the patterned bulk layer;

selectively patterning the second sacrificial layer to remove a portion of the second sacrificial layer over the electrode portion of the bulk layer;

forming and patterning an electrode layer over the patterned second sacrificial layer and over the electrode portion exposed by removal of the portion of the second sacrificial layer; and

removing the second sacrificial layer following the forming and patterning of the electrode layer;

whereby an electrode is formed that is configured to propagate an electrostatic field in close proximity to the resonator.

4. The method of claim 1, wherein the one or more integrated circuits comprise one or more memory cell circuits.

5. The method of claim 1, wherein the sacrificial layer comprises a hardened photoresist.

6. The method of claim 1, wherein the hinge layer comprises aluminum or an aluminum alloy.

7. A method of forming a microelectromechanical system (MEMS) device, comprising:

forming circuit elements over a substrate;

forming and planarizing an oxide layer over the circuit elements;

forming a conductive layer over the planarized oxide layer;

selectively patterning the conductive layer to form first gaps to define laterally spaced first, second and third electrodes coupled for receiving electrical signals from the circuit elements;

forming a sacrificial layer over the patterned conductive layer including within the first gaps;

selectively patterning the sacrificial layer to form second gaps that expose respective surfaces of the first and third electrodes;

forming a hinge layer over the patterned sacrificial layer including within the second gaps;

forming a bulk layer over the hinge layer including over the hinge layer within the second gaps;

selectively patterning the bulk layer to form third gaps to define a resonator laterally spaced by flexure portions of the hinge layer from first and second support posts; and

removing remaining portions of the sacrificial layer, leaving the resonator supported between the support posts by the flexure portions of the hinge layer;

whereby a changing electrostatic field generated by first and second electrical signals respectively communicated from the circuit elements to the first and third electrodes and to the second electrode can drive an oscillation of the resonator at a resonance frequency along an axis substantially perpendicular to the planarized oxide layer.

8. The method of claim 7, further comprising forming a dielectric layer over the patterned conductive layer including within the first gaps;

wherein the sacrificial layer is formed over the dielectric layer.

9. The method of claim 8, further comprising forming a support layer over the hinge layer;

and selectively patterning the support layer to define supporting nubs at respective junctions of the flexure portions with the resonator and first and second support posts.

10. The method of claim 9, wherein the electrodes are coupled for receiving electrical signals from the circuit elements by vias through the planarized oxide layer.

11. The method of claim 10, wherein the circuit elements comprise memory circuit elements.

12. The method of claim 11, wherein the memory circuit elements include SRAM memory cell transistors.

13. The method of claim 11, wherein the hinge layer comprises aluminum or an aluminum alloy and has a thickness of 200 to 1000 angstroms;

and the resonator is lateral spaced by the flexure portions from the first and second support posts by 0.2 to 1.5 microns.

14. The method of claim 13, wherein the support layer comprises SiO₂ and has a thickness of 1500 to 7500 angstroms.

15. The method of claim 14, wherein the sacrificial layer comprises a hardened photoresist.

16. The method of claim 7, wherein the memory circuit elements comprise SRAM memory cell transistors.

17. The method of claim 7, further comprising forming a support layer over the hinge layer;

and selectively patterning the support layer to define supporting nubs at respective junctions of the flexure portions with the resonator and first and second support posts.

18. A microelectromechanical system (MEMS) device, comprising:

circuit elements formed over a substrate;

a general planar oxide layer formed over the circuit elements;

a conductive layer formed over the oxide layer, the conductive layer defining laterally spaced first, second and third electrodes coupled for receiving electrical signals from the circuit elements;

forming a sacrificial layer over the patterned conductive layer including within the first gaps;

selectively patterning the sacrificial layer to form second gaps that expose respective surfaces of the first and third electrodes;

a hinge layer formed over the conductive layer with a raised portion spaced above the second electrode by a gap supported between support post portions respectively contacting the first and third electrodes;

a bulk layer formed over the hinge layer having a resonator portion defining laterally spaced resonator and support post portions, with the resonator portion supported by flexure portions of the hinge layer on the first and second support post portions;

whereby a changing electrostatic field generated by first and second electrical signals respectively communicated from the circuit elements to the first and third electrodes and to the second electrode can drive an oscillation of the resonator at a resonance frequency along an axis substantially perpendicular to the planar oxide layer.

19. The device of claim 18, further comprising a support layer formed over the hinge layer and defining supporting nubs at respective junctions of the flexure portions with the resonator portion and the support post portions.

20. The device of claim 19, wherein the circuit elements comprise SRAM memory cell transistors.