Vertical accelerometer
First Claim
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1. A vertical accelerometer comprising:
- a substrate;
a plurality of unit vertical accelerometers, each having a detection mass disposed over the substrate capable of being rotated by acceleration applied perpendicular to the substrate; and
a detection electrode formed on the detection mass,wherein the plurality of unit vertical accelerometers are provided such that a detection electrode of a unit vertical accelerometer opposes a detection electrode of another unit vertical accelerometer to detect the acceleration through a variation in capacitance due to variation in an area in which the detection electrodes opposing each other overlap with each other.
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Abstract
Provided is a vertical accelerometer for measuring acceleration applied perpendicular to a substrate to increase sensitivity thereof. The vertical accelerometer includes a substrate, and a plurality of unit vertical accelerometers, each having a detection mass disposed on the substrate to be rotated by acceleration applied perpendicular to the substrate, and a detection electrode formed at the detection mass. Here, the unit vertical accelerometers are provided to be in contact with the detection electrodes to detect the acceleration through variation in capacitance due to variation in area in which the contacted detection electrodes overlaps each other.
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Citations
8 Claims
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1. A vertical accelerometer comprising:
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a substrate; a plurality of unit vertical accelerometers, each having a detection mass disposed over the substrate capable of being rotated by acceleration applied perpendicular to the substrate; and a detection electrode formed on the detection mass, wherein the plurality of unit vertical accelerometers are provided such that a detection electrode of a unit vertical accelerometer opposes a detection electrode of another unit vertical accelerometer to detect the acceleration through a variation in capacitance due to variation in an area in which the detection electrodes opposing each other overlap with each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification