×

Vertical accelerometer

  • US 8,544,326 B2
  • Filed: 05/20/2010
  • Issued: 10/01/2013
  • Est. Priority Date: 12/14/2009
  • Status: Active Grant
First Claim
Patent Images

1. A vertical accelerometer comprising:

  • a substrate;

    a plurality of unit vertical accelerometers, each having a detection mass disposed over the substrate capable of being rotated by acceleration applied perpendicular to the substrate; and

    a detection electrode formed on the detection mass,wherein the plurality of unit vertical accelerometers are provided such that a detection electrode of a unit vertical accelerometer opposes a detection electrode of another unit vertical accelerometer to detect the acceleration through a variation in capacitance due to variation in an area in which the detection electrodes opposing each other overlap with each other.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×