Coating holder and coating device having same

• US 8,545,632 B2
• Filed: 06/21/2010
• Issued: 10/01/2013
• Est. Priority Date: 04/09/2010
• Status: Expired due to Fees

• Current Assignee: Hon Hai Precision Industry Co., Ltd.
• Original Assignee: Hon Hai Precision Industry Co., Ltd.
• Inventors: Pei, Shao-Kai
• Primary Examiner(s): Chen, Keath
• Assistant Examiner(s): LEE, AIDEN Y
• Application Number:
  US12/820,056
• Publication Number:
  US 20110247558A1
• Time in Patent Office: 1,198 Days
• Field of Search: None
• US Class Current: 118/730
• CPC Class Codes: C23C 14/50 Substrate holders
• CPC Class Codes: C23C 14/505 for rotation of the substrates
• CPC Class Codes: C23C 16/458 characterised by the method used for supporting substrates in the reaction chamber
• CPC Class Codes: C23C 16/4584 the substrate being rotated
• CPC Class Codes: C23C 16/4588 the substrate being rotated

Abstract

A coating holder for holding a plurality of workpieces includes a rotating shaft, a first driving member, a plurality of hanging arms, a plurality of supporting trays, and a plurality of second driving members. The first driving member is configured for driving the rotating shaft to rotate. The hanging arms extend from the rotating shaft. Each hanging arm includes a free end distal from the rotating shaft. The supporting trays are configured for holding the workpieces. The second driving members are fixed in the respective free ends and are connected to the respective supporting trays. The second driving members are configured for driving the supporting trays to rotate.

Claims

1. A coating holder for holding a plurality of workpieces, comprising:

a rotating shaft;

a first driving member being a servomotor and comprising a first stator and a first rotor extending from the first stator, the first driving member configured for driving the rotating shaft to rotate about a first axis;

a plurality of supporting trays configured for holding the workpieces;

a plurality of hanging arms perpendicularly extending from the rotating shaft, each hanging arm comprising a free end distal from the rotating shaft, each free end having two of the supporting trays hanging therefrom;

wherein the two supporting trays of each hanging arm comprises a main body, the main body comprises a first side and a second side opposite to the first side, the two supporting trays are rotatable about the second axis between a first position where the first sides of the supporting trays are substantially located on a common plane and face upward, and a second position where the second sides of the supporting trays are substantially located on a common plane and face upward;

a plurality of second driving members, each second driving member being a servomotor and comprising a second stator and a second rotor extending from the second stator, wherein each free end is equipped with two of the second driving members on opposite surface thereof, the two supporting trays are hung on the opposite surface of the free end via the two second driving members, respectively, and the second driving members are configured for driving the supporting trays to rotate about a second axis substantially perpendicular to the first axis.

2. The coating holder as claimed in claim 1, wherein each hanging arm is substantially a straight beam, the hanging arm comprises a connection end perpendicularly extending from the rotating shaft and the free end opposite to the connection end, the two opposite surfaces of the free end are a first surface and a second surface, a first through hole is defined in the free end through the first surface and the second surface, a second through hole is defined in each of the two corresponding supporting trays, the two second stators are fixed in the first through hole back to back, and the two second rotors extend from the first through hole to engage in the respective second through holes such that the two supporting trays are hung on the first surface and the second surface, respectively.

3. The coating holder as claimed in claim 2, wherein each supporting tray comprises a protrusion, the protrusion extends from the first side, and the second through hole is defined in the protrusion.

4. The coating holder as claimed in claim 3, further comprising a plurality of magnets, wherein each supporting tray comprises a plurality of first recesses and a plurality of second recesses spaced apart from the first recesses, the first recesses are arranged in a plurality of first fan-shaped lines and configured for receiving the workpieces, the second recesses are arranged in a plurality of second fan-shaped lines and configured for receiving the magnets, and the first fan-shaped lines and the second fan-shaped lines are substantially parallel to each other and arranged alternately.

5. The coating holder as claimed in claim 4, wherein the magnetic poles of each of the magnets are exposed from the first side and the second side, respectively, the magnetic poles of the magnets in a given fan-shaped line exposed from the first side are contrary to those of the magnets in an adjacent fan-shaped line exposed from the first side, and the magnetic poles of the magnets in a given fan-shaped line exposed from the second side are contrary to those of the magnets in an adjacent fan-shaped line exposed from the second side.

6. The coating holder as claimed in claim 1, wherein each hanging arm comprises a connecting portion and a hanging portion, the connecting portion comprises a first end perpendicularly extending from the rotating shaft and a second end opposite to the first end, the hanging, portion comprises a third end perpendicularly extending from the second end and the free end opposite to the third end, the two opposite surfaces of the free end are a first surface and a second surface, a first through hole is defined in the free end through the first surface and the second surface, a second through hole is defined in each of the two corresponding supporting trays, the two second stators are fixed in the first through hole back to back, and the two second rotors extend from the first through hole to engage in the respective second through holes such that the two supporting trays are hung on the first surface and the second surface, respectively.

7. The coating holder as claimed in claim 6, wherein each supporting tray comprises a main body and a protrusion, the main body comprises a first side and a second side opposite to the first side, the protrusion extends from the first side, and the second through hole is defined in the protrusion.

8. The coating holder as claimed in claim 7, wherein the two supporting trays are rotatable about the second axis between a first position when the first sides of the supporting trays are substantially located on a common plane and face upward, and a second position where the second sides of the supporting trays are substantially located on a common plane and face upward.

9. The coating holder as claimed in claim 7, further comprising a plurality of magnets, wherein each supporting tray comprises a plurality of first recesses and a plurality of second recesses spaced apart from the first recesses, the first recesses are arranged in a plurality of first fan-shaped lines and configured for receiving the workpieces, the second recesses are arranged in a plurality of second fan-shaped lines and configured for receiving the magnets, and the first fan-shaped lines and the second fan-shaped lines are substantially parallel to each other and arranged alternately.

10. The coating holder as claimed in claim 9, wherein the magnetic poles of each of the magnets are exposed from the first side and the second side, respectively, the magnetic poles of the magnets in a given fan-shaped line exposed from the first side are contrary to those of the magnets in an adjacent fan-shaped line exposed from the first side, and the magnetic poles of the magnets in a given fan-shaped line exposed from the second side are contrary to those of the magnets in an adjacent fan-shaped line exposed from the second side.

11. The coating holder as claimed in claim 6, wherein the rotating shaft comprises a top end and a bottom end, a fixing hole is defined in the top end, the first rotor engages in the fixing, hole, the bottom end is equipped with two of the second driving members on opposite surfaces thereof, and two of the supporting trays are hung on the opposite surfaces of the bottom end via the two second driving members, respectively.

12. A coating device for coating a plurality of workpieces, comprising:

a vacuum container;

a plasma source received in the vacuum container; and

a coating holder received in the vacuum container facing the plasma source, the coating holder configured for holding the workpieces, the coating holder comprising;

a rotating shaft;

a first driving member being a servomotor and comprising a first stator and a first rotor extending from the first stator, the first driving member configured for driving the rotating shaft to rotate about a first axis;

a plurality of supporting trays configured for holding the workpieces;

a plurality of hanging arms perpendicularly extending from the rotating shaft, each hanging arm comprising a free end distal from the rotating shaft, each free end having two of the supporting trays hanging therefrom;

wherein the two supporting trays of each hanging arm comprises a main body, the main body comprises a first side and a second side opposite to the first side, the two supporting trays are rotatable about the second axis between a first position where the first sides of the supporting trays are substantially located on a common plane and face upward, and a second position where the second sides of the supporting trays are substantially located on a common plane and face upward;

a plurality of second driving members, each second driving member being a servomotor and comprising a second stator and a second rotor extending from the second stator, wherein each free end is equipped with two of the second driving members on opposite surface thereof, the two supporting trays are hung on the opposite surface of the free end via the two second driving members, respectively, and the second driving members are configured for driving the supporting trays to rotate about a second axis substantially perpendicular to the first axis.

13. The coating device as claimed in claim 12, wherein each hanging arm comprises a connecting portion and a hanging portion, the connecting portion comprises a first end perpendicularly extending from the rotating shaft and a second end opposite to the first end, the hanging portion comprises a third end perpendicularly extending from the second end and the free end opposite to the third end, the two opposite surfaces of the free end are a first surface and a second surface, a first through hole is defined in the free end through the first surface and the second surface, a second through hole is defined in each of the two corresponding supporting trays, the two second stators are fixed in the first through hole back to hack, and the two second rotors extend from the first through hole to engage in the respective second through holes such that the two supporting trays are hung on the first surface and the second surface, respectively.

14. The coating holder as claimed in claim 13, wherein each supporting tray comprises a protrusion, the protrusion extends from the first side, and the second through hole is defined in the protrusion.

15. The coating device as claimed in claim 14, further comprising a plurality of magnets, wherein each supporting tray comprises a plurality of first, recesses and a plurality of second recesses spaced apart from the first recesses, the first recesses are arranged in a plurality of first fan-shaped lines and configured for receiving the workpieces, the second recesses are arranged in a plurality of second fan-shaped lines and configured for receiving the magnets, and the first fan-shaped lines and the second fan-shaped lines are substantially parallel to each other and arranged alternately.

16. The coating device as claimed in claim 15, wherein the magnetic poles of each of the magnets are exposed from the first side and the second side, respectively, the magnetic poles of the magnets in a given fin-shaped line exposed from the first side are contrary to those of the magnets in an adjacent fan-shaped line exposed from the first side, and the magnetic poles of the magnets in a given fan-shaped line exposed from the second side are contrary to those of the magnets in an adjacent fan-shaped line exposed from the second side.

17. The coating, device as claimed in claim 13, wherein the rotating shaft comprises a top end and a bottom end, a fixing hole is defined in the top end, the first rotor engages in the fixing hole, the bottom end is equipped with two of the second driving members on opposite surfaces thereof, and two of the supporting trays are hung on the opposite surfaces of the bottom end via the two second driving members, respectively.

18. The coating device as claimed in claim 12, wherein each hanging arm is substantially a straight beam, the hanging arm comprises a connection end perpendicularly extending from the rotating shaft and the free end opposite to the connection end, the two opposite surfaces of the free end are a first surface and a second surface, a first through hole is defined in the free end through the first surface and the second surface, a second through hole is defined in each of the two corresponding supporting trays, the two second stators are fixed in the first through hole back to back, and the two second rotors extend from the first through hole to engage in the respective second through holes such that the two supporting trays are hung on the first surface and the second surface, respectively.