Sensor array for measuring plasma characteristics in plasma processing environments

• US 8,545,669 B2
• Filed: 02/25/2005
• Issued: 10/01/2013
• Est. Priority Date: 08/14/2003
• Status: Expired due to Fees

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Mahoney, Leonard J., Almgren, Carl W., Roche, Gregory A., Saylor, William W., Sproul, William D., Walde, Hendrik V.
• Primary Examiner(s): DHINGRA, RAKESH KUMAR
• Application Number:
  US11/066,520
• Publication Number:
  US 20050151544A1
• Time in Patent Office: 3,140 Days
• Field of Search: 156/345.24, 156/345.25, 156/345.26, 156/345.27, 156/345.28, 118/712, 216/59, 216/67, 315/111.01, 204/298.03, 438/7
• US Class Current: 156/345.24
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/32954 Electron temperature measurement

Abstract

A plasma processing system is provided with diagnostic apparatus for making in-situ measurements of plasma properties. The diagnostic apparatus generally comprises a non-invasive sensor array disposed within a plasma processing chamber, an electrical circuit for stimulating the sensors, and means for recording and communicating sensor measurements for monitoring or control of the plasma process. In one form, the sensors are dynamically pulsed dual floating Langmuir probes that measure incident charged particle currents and electron temperatures in proximity to the plasma boundary or boundaries within the processing system. The plasma measurements may be used to monitor the condition of the processing plasma or furnished to a process system controller for use in controlling the plasma process.

Claims

1. A method of measuring plasma properties in a plasma processing system, comprising:

a) providing a plasma processing system having a plasma chamber;

b) providing a sensor array comprising a plurality of electrically floating sensors disposed within the plasma chamber, wherein each sensor includes first and second conductive pads;

c) generating a plasma within the plasma chamber for use in a plasma process;

d) collecting a plurality of measurements related to bulk properties of the plasma using the plurality of electrically floating sensors in sensor array by applying a voltage pulse to each sensor and measuring a current with each sensor;

e) analyzing a matrix constructed from the plurality of measurements, wherein the matrix includes a plurality of diagonal terms I(i,i) and off-diagonal terms I(i,j), wherein each diagonal term I(i,i) represents a current measured between the first and second pads within a sensor in the array, and wherein each off-diagonal term I(i,j) represents a current obtained by passive current measurement at a given sensor (i) due to active pulsing of a different sensor (j); and

f) determining one or more bulk properties of the plasma from the off-diagonal terms I(i,j) of the matrix, wherein the bulk properties include a bulk conductance of the plasma.

2. The method of claim 1 wherein the sensors are dual floating Langmuir probes.

3. The method of claim 2 wherein the array of dual floating Langmuir probes comprises a common electron return current pad.

4. The method of claim 1 wherein the sensor array is disposed along a chamber liner contained within the plasma chamber.

5. The method of claim 1 wherein the sensor array is disposed along a dielectric isolation ring contained within the plasma chamber.

6. The method of claim 1 wherein the sensor array is disposed along a focus ring contained within the plasma chamber.

7. The method of claim 1 wherein the sensor array is disposed about a workpiece chuck contained within the plasma chamber.

8. The method of claim 1 wherein the bulk properties of the plasma are determined in real time.

9. The method of claim 1 wherein the plurality of sensors is dynamically pulsed to collect the data related to bulk properties of the plasma.

10. The method of claim 9 wherein the plasma is created using a pulsed power source and the dynamic pulsing of the plurality of the sensors is synchronized with the pulsing of the pulsed power source.

11. The method of claim 1, further comprising the step of transmitting the data related to bulk properties of the plasma outside the plasma process.

12. The method of claim 11 wherein the data related to bulk properties of the plasma are transmitted wirelessly outside the plasma process.

13. The method of claim 1, further comprising the step of furnishing the data related to bulk properties of the plasma to a process system controller that controls the plasma process.

14. A system for measuring plasma properties in a plasma processing system, comprising:

a) a sensor array disposed about a boundary of a processing region of a plasma processing system, the sensor array comprising a plurality of electrically floating sensors, wherein each sensor includes first and second conductive pads;

b) a circuit for stimulating the plurality of sensors in the sensor array to collect a plurality of measurements related to properties of a processing plasma within the plasma chamber by applying a voltage pulse to each sensor and measuring a current with each sensor; and

c) a processor coupled to the sensor array, wherein the processor is configured to analyze a matrix constructed from the plurality of measurements and determine one or more bulk properties of the processing plasma from a plurality of diagonal terms I(i,i) and off-diagonal terms I(i,j) of the matrix, wherein each diagonal term I(i,i) represents a current measured between the first and second pads within a sensor in the array, and wherein each off-diagonal term I(i,j) represents a current obtained by passive current measurement at a given sensor (i) due to active pulsing of a different sensor (j), and wherein the one or more bulk properties include a bulk conductance of the plasma.

15. The system of claim 14 wherein the sensors are dual floating Langmuir probes.

16. The system of claim 15 wherein the array of dual floating Langmuir probes comprises a common electron return current pad.

17. The system of claim 14 wherein the sensor array is disposed along a chamber liner contained within the plasma chamber.

18. The system of claim 14 wherein the sensor array is disposed along a dielectric isolation ring contained within the plasma chamber.

19. The system of claim 14 wherein the sensor array is disposed along a focus ring contained within the plasma chamber.

20. The system of claim 14 wherein the sensor array is disposed about a workpiece chuck contained within the plasma chamber.

21. The system of claim 14 wherein the sensors are removable from the plasma processing system.

22. The system of claim 14 wherein the one or more properties of the plasma include one or more bulk properties of the processing plasma.

23. The system of claim 14 wherein the circuit for stimulating the plurality of sensors is a dynamic pulsing circuit.

24. The system of claim 14 wherein the circuit for stimulating the plurality of sensors is a multiplex circuit.

25. The system of claim 14, further comprising wireless means for communicating the plurality of measurements between the sensor array and the processor.

26. The system of claim 14 wherein the circuit for stimulating the plurality of sensors in the sensor array is adapted to pulse a first floating sensor in the array while measuring a current to a second sensor in the array.