Methods for forming carbon nanotubes
First Claim
1. A method for growing carbon nanotubes on a substrate in a reaction space, comprising:
- forming an initial surface termination on a surface of the substrate;
forming discontinuous metal particles at distinct sites on the surface by atomic layer deposition; and
depositing carbon nanotubes on to said metal particles in-situ.
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Accused Products
Abstract
Methods of forming a roughened metal surface on a substrate for nucleating carbon nanotube growth, and subsequently growing carbon nanotubes are provided. In preferred embodiments roughened surfaces are formed by selectively depositing metal or metal oxide on a substrate surface to form discrete, three-dimensional islands. Selective deposition may be obtained, for example, by modifying process conditions to cause metal agglomeration or by treating the substrate surface to provide a limited number of discontinuous reactive sites. The roughened metal surface may then be used as nucleation points for initiating carbon nanotube growth. The carbon nanotubes are grown in the same process chamber (in-situ) as the formation of the three dimensional metal islands without exposing the substrate to air.
59 Citations
35 Claims
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1. A method for growing carbon nanotubes on a substrate in a reaction space, comprising:
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forming an initial surface termination on a surface of the substrate; forming discontinuous metal particles at distinct sites on the surface by atomic layer deposition; and depositing carbon nanotubes on to said metal particles in-situ. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for growing carbon nanotubes, comprising:
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providing a substrate in a reaction space; modifying the surface of the substrate to produce discrete reactive sites; depositing metal particles at the reactive sites using alternating and sequential pulses of a first metal source chemical and a second non-metal species; and subsequently depositing carbon nanotubes on to said metal particles, wherein the substrate is not exposed to air between depositing metal particles and depositing carbon nanotubes. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A method for forming carbon nanotubes on a substrate in a reaction space, comprising:
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depositing catalyst nanoparticles on said substrate; and depositing carbon nanotubes on said substrate in-situ. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35)
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Specification