Nano-fiber arrayed surfaces
First Claim
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1. An apparatus, comprising a nano-electromechanical system (NEMS) or micro-electromechanical system (MEMS), wherein the NEMS or MEMS comprises as at least one component:
- a substrate comprising a surface; and
a plurality of substantially straight nano-fibers, each having a longitudinal dimension, said nano-fibers partially embedded in the surface such that a portion of the embedded nano-fibers extend above the surface along said longitudinal dimensions, wherein the nano-fibers are arranged such that said longitudinal dimensions are substantially parallel to the surface, wherein all of said nano-fibers partially embedded in the surface are in substantially a same plane.
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Abstract
Surfaces are provided comprising an array of partially embedded nano-fibers. Two such surfaces may contact each other such that the respective nano-fibers contact at orthogonal angles, resulting in ultra-low friction and ultra-low adhesion contact. Such configurations are useful in several NEMS or MEMS applications, as well as macro-sized applications. Alternatively, the surfaces may contact each other such that the respective nano-fibers are parallel. These configurations are useful in micro-stage or high-order three-dimensional self assembly applications.
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12 Claims
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1. An apparatus, comprising a nano-electromechanical system (NEMS) or micro-electromechanical system (MEMS), wherein the NEMS or MEMS comprises as at least one component:
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a substrate comprising a surface; and a plurality of substantially straight nano-fibers, each having a longitudinal dimension, said nano-fibers partially embedded in the surface such that a portion of the embedded nano-fibers extend above the surface along said longitudinal dimensions, wherein the nano-fibers are arranged such that said longitudinal dimensions are substantially parallel to the surface, wherein all of said nano-fibers partially embedded in the surface are in substantially a same plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification