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Stage drive method and stage unit, exposure apparatus, and device manufacturing method

  • US 8,547,528 B2
  • Filed: 08/05/2009
  • Issued: 10/01/2013
  • Est. Priority Date: 02/02/2004
  • Status: Expired due to Fees
First Claim
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1. An exposure apparatus that exposes a substrate via a projection optical system and a liquid, the apparatus comprising:

  • a first stage and a second stage that are movable independently from each other;

    a mark detection system placed apart from the projection optical system in a first direction, which detects a mark on the substrate; and

    a drive system that drives the first and second stages in a second direction intersecting the first direction so that a transition from a first state where one of the first and second stages faces the projection optical system to a second state where the other of the first and second stages faces the projection optical system is performed while holding the liquid in a space between the projection optical system and at least one of the stages.

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