Stage drive method and stage unit, exposure apparatus, and device manufacturing method
First Claim
1. An exposure apparatus that exposes a substrate via a projection optical system and a liquid, the apparatus comprising:
- a first stage and a second stage that are movable independently from each other;
a mark detection system placed apart from the projection optical system in a first direction, which detects a mark on the substrate; and
a drive system that drives the first and second stages in a second direction intersecting the first direction so that a transition from a first state where one of the first and second stages faces the projection optical system to a second state where the other of the first and second stages faces the projection optical system is performed while holding the liquid in a space between the projection optical system and at least one of the stages.
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Abstract
When a transition from a first state where one stage is positioned at a first area directly below projection optical system to which liquid is supplied to a state where the other stage is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.
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Citations
35 Claims
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1. An exposure apparatus that exposes a substrate via a projection optical system and a liquid, the apparatus comprising:
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a first stage and a second stage that are movable independently from each other; a mark detection system placed apart from the projection optical system in a first direction, which detects a mark on the substrate; and a drive system that drives the first and second stages in a second direction intersecting the first direction so that a transition from a first state where one of the first and second stages faces the projection optical system to a second state where the other of the first and second stages faces the projection optical system is performed while holding the liquid in a space between the projection optical system and at least one of the stages. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 30, 31)
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11. An exposure apparatus that exposes a substrate via a projection optical system and a liquid, the apparatus comprising:
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a first stage and a second stage that are movable independently from each other; and a drive system that drives the first stage on which the substrate is mounted in a first direction to perform scanning exposure of the substrate, and also drives the first and second stages in a second direction intersecting the first direction so that a transition from a first state where one of the first and second stages faces the projection optical system to a second state where the other of the first and second stages faces the projection optical system is performed while holding the liquid in a space between the projection optical system and at least one of the stages. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 32, 33)
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20. An exposure apparatus that exposes a substrate via a projection optical system and a liquid, the apparatus comprising:
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a first stage and a second stage that are movable independently from each other in a predetermined area that includes a first area where the projection optical system is placed and a second area located on one side in a first direction with respect to the first area; and a drive system that drives the first and second stages in a second direction intersecting the first direction so that a transition from a first state where one of the first and second stages faces the projection optical system to a second state where the other of the first and second stages faces the projection optical system is performed while holding the liquid in a space between the projection optical system and at least one of the stages. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 34, 35)
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Specification