Mechanical layer and methods of shaping the same
First Claim
Patent Images
1. An electromechanical (EMS) systems device, comprising:
- a substrate;
a light-absorbing structure on the substrate;
a movable layer; and
a support structure on the substrate for supporting the movable layer, wherein the support structure is configured to space the movable layer from the substrate to define a collapsible gap,wherein the movable layer includes a kink adjacent to the support structure, wherein the kink includes a rising portion and a falling portion, wherein the rising portion extends away from the gap and the falling portion extends toward the gap, wherein the kink overlaps the light-absorbing structure, wherein the kink is configured to control curvature of the movable layer in such a way that the curvature changes upon application of a bias voltage.
2 Assignments
0 Petitions
Accused Products
Abstract
A method of shaping a mechanical layer is disclosed. In one embodiment, the method comprises depositing a support layer, a sacrificial layer and a mechanical layer over a substrate, and forming a support post from the support layer. A kink is formed adjacent to the support post in the mechanical layer. The kink comprises a rising edge and a falling edge, and the kink can be configured to control the shaping and curvature of the mechanical layer upon removal of the sacrificial layer.
54 Citations
35 Claims
-
1. An electromechanical (EMS) systems device, comprising:
-
a substrate; a light-absorbing structure on the substrate; a movable layer; and a support structure on the substrate for supporting the movable layer, wherein the support structure is configured to space the movable layer from the substrate to define a collapsible gap, wherein the movable layer includes a kink adjacent to the support structure, wherein the kink includes a rising portion and a falling portion, wherein the rising portion extends away from the gap and the falling portion extends toward the gap, wherein the kink overlaps the light-absorbing structure, wherein the kink is configured to control curvature of the movable layer in such a way that the curvature changes upon application of a bias voltage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
-
21. An electromechanical systems (EMS) device, comprising:
-
a substrate means; a light-absorbing means on the substrate means; a deformable means having a relaxed and an actuated position; and a support means for supporting the deformable means and for spacing the deformable means from the substrate by a gap, wherein the deformable means comprises a shaping means for directing curvature of the deformable means so that the curvature changes upon application of a bias voltage, wherein the shaping means overlaps the light absorbing means. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
-
-
29. A method of forming a movable layer in an electromechanical systems (EMS) device, comprising:
-
providing a substrate; depositing a light-absorbing structure over at least a portion of the substrate; depositing a support layer over at least a portion of the substrate; forming a support post from at least the support layer; providing a movable layer with a kink adjacent to the support post, wherein the kink comprises a rising edge and a falling edge, and wherein the kink overlaps the light-absorbing structure, wherein the kink is configured to control curvature of the movable layer in such a way that the curvature changes upon application of a bias voltage; and supporting the movable layer with the support post to define a gap over the substrate. - View Dependent Claims (30, 31, 32, 33, 34, 35)
-
Specification