Comb sense microphone
First Claim
1. A microphone, comprising:
- a) a body, supporting a plurality of finger electrodes;
b) a diaphragm mounted for displacement in response to acoustic waves on the body by at least one mounting, having a plurality of corresponding finger electrodes configured to generate a electrical capacitance signal with respect to the finger electrodes;
c) an electrical connection, configured to apply an electrical bias between the plurality of finger electrodes and the plurality of corresponding finger electrodes, and to read an electrical signal corresponding to a change in capacitance between the finger electrodes and the corresponding finger electrodes representing a displacement of the diaphragm with respect to the body due to the acoustic waves, wherein the corresponding finger electrodes of the diaphragm electrically communicate through the at least one mounting, while maintaining electrical isolation from the finger electrodes of the body.
1 Assignment
0 Petitions
Accused Products
Abstract
A miniature microphone, comprising a diaphragm, supported for displacement in response to acoustic waves, from which a plurality of projections extend; a plurality of projections extending from a surface; a body, supporting the surface to maintain the plurality of projections from the diaphragm and the plurality of projections from the surface in close proximity; and an electromagnetic sensor adapted to sense an electromagnetic interaction between the plurality of projections from the diaphragm and the plurality of projections from the surface and produce an electrical signal in response thereto. The interaction may be detected substantially without inducing a force which tends to substantially displace the diaphragm, since the electrostatic force is substantially parallel to the diaphragm surface.
15 Citations
19 Claims
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1. A microphone, comprising:
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a) a body, supporting a plurality of finger electrodes; b) a diaphragm mounted for displacement in response to acoustic waves on the body by at least one mounting, having a plurality of corresponding finger electrodes configured to generate a electrical capacitance signal with respect to the finger electrodes; c) an electrical connection, configured to apply an electrical bias between the plurality of finger electrodes and the plurality of corresponding finger electrodes, and to read an electrical signal corresponding to a change in capacitance between the finger electrodes and the corresponding finger electrodes representing a displacement of the diaphragm with respect to the body due to the acoustic waves, wherein the corresponding finger electrodes of the diaphragm electrically communicate through the at least one mounting, while maintaining electrical isolation from the finger electrodes of the body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 19)
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12. A method of sensing acoustic waves, comprising:
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providing a microphone body, supporting a plurality of finger electrodes, and a diaphragm mounted for displacement in response to acoustic waves on the body by at least one mounting, having a plurality of corresponding finger electrodes configured to generate a electrical capacitance signal with respect to the finger electrodes; and electrically communicating with the plurality of corresponding finger electrodes through the mounting, while maintaining substantial electrical isolation between the plurality of finger electrodes and the corresponding finger electrodes, for; applying an electrical bias between the plurality of finger electrodes and the corresponding finger electrodes; and reading an electrical signal corresponding to a change in capacitance between the plurality of finger electrodes and the corresponding finger electrodes representing a displacement of the diaphragm with respect to the body due to the acoustic waves. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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Specification