Microelectromechanical gyroscope with enhanced rejection of acceleration noises
First Claim
Patent Images
1. A microelectromechanical device, comprising:
- a substrate;
a first electrode suspended above the substrate, the first electrode having a first patterned side and a second patterned side opposite to the first patterned side, the first patterned side having a different pattern than the second patterned side;
a second electrode suspended above the substrate, the second electrode having a first patterned side that corresponds to and faces the first patterned side of the first electrode;
a third electrode suspended above the substrate, the third electrode having a first patterned side that corresponds to and faces the second patterned side of the first electrode.
0 Assignments
0 Petitions
Accused Products
Abstract
An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.
50 Citations
21 Claims
-
1. A microelectromechanical device, comprising:
-
a substrate; a first electrode suspended above the substrate, the first electrode having a first patterned side and a second patterned side opposite to the first patterned side, the first patterned side having a different pattern than the second patterned side; a second electrode suspended above the substrate, the second electrode having a first patterned side that corresponds to and faces the first patterned side of the first electrode; a third electrode suspended above the substrate, the third electrode having a first patterned side that corresponds to and faces the second patterned side of the first electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A device, comprising:
-
a substrate; a driving mass having a center point, the driving mass including a first opening centered about the center point; a first and second sensing mass positioned in the first opening on opposing sides of the center point, the first and second sensing mass having a second and third opening, respectively, each of the second and third opening including; a first mobile electrode coupled to the first sensing mass, the first mobile electrode having a first edge with a first pattern and a second edge, opposite to the first edge, having a second pattern that is different from the first pattern; a first fixed electrode coupled to the substrate, the first fixed electrode having an edge that faces the first edge of the first mobile electrode and matches the first pattern; a second fixed electrode coupled to the substrate, the second fixed electrode having an edge that faces the second edge of the first mobile electrode and matches the second pattern. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
-
-
19. A method, comprising:
-
forming a first mobile electrode to have a first side that has a first pattern and a second side that has a second pattern, the first pattern being different from the second pattern; forming a first fixed electrode to have a first side that faces the first side of the first mobile electrode and matches the first pattern, the first mobile electrode and the first fixed electrode forming a first capacitor; and forming a second fixed electrode to have a first side that faces the second side of the first mobile electrode and matches the second pattern, the first mobile electrode and the second fixed electrode forming a second capacitor. - View Dependent Claims (20, 21)
-
Specification