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Microelectromechanical gyroscope with enhanced rejection of acceleration noises

  • US 8,549,917 B2
  • Filed: 09/14/2012
  • Issued: 10/08/2013
  • Est. Priority Date: 12/23/2008
  • Status: Active Grant
First Claim
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1. A microelectromechanical device, comprising:

  • a substrate;

    a first electrode suspended above the substrate, the first electrode having a first patterned side and a second patterned side opposite to the first patterned side, the first patterned side having a different pattern than the second patterned side;

    a second electrode suspended above the substrate, the second electrode having a first patterned side that corresponds to and faces the first patterned side of the first electrode;

    a third electrode suspended above the substrate, the third electrode having a first patterned side that corresponds to and faces the second patterned side of the first electrode.

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