Microfabricated elastomeric valve and pump systems

• US 8,550,119 B2
• Filed: 10/31/2007
• Issued: 10/08/2013
• Est. Priority Date: 06/28/1999
• Status: Expired due to Term

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Unger, Marc A., Chou, Hou-Pu, Thorsen, Todd A., Scherer, Axel, Quake, Stephen R., Enzelberger, Markus, Adams, Mark L., Hansen, Carl L.
• Primary Examiner(s): SCHNEIDER, CRAIG M
• Application Number:
  US11/932,552
• Publication Number:
  US 20080289710A1
• Time in Patent Office: 2,169 Days
• Field of Search: 137/565.16, 137/803, 137/807, 137/824, 137/833, 137/825, 137/829, 251/11
• US Class Current: 137/829
• CPC Class Codes: B01J 2219/00355 peristaltic
• CPC Class Codes: B01J 2219/00378 Piezoelectric or ink jet dispensers
• CPC Class Codes: B01J 2219/00396 Membrane valves
• CPC Class Codes: B01J 2219/00398 in multiple arrangements
• CPC Class Codes: B01J 2219/00439 using micromirror arrays
• CPC Class Codes: B01J 2219/005 Beads
• CPC Class Codes: B01J 2219/00527 Sheets
• CPC Class Codes: B01J 2219/00605 the compounds being directly bound or immobilised to solid supports
• CPC Class Codes: B01J 2219/00659 Two-dimensional arrays
• CPC Class Codes: B01J 2219/00707 separated from the reactor apparatus
• CPC Class Codes: B01J 2219/00722 Nucleotides
• CPC Class Codes: B01J 2219/00725 Peptides
• CPC Class Codes: B01L 2200/025 Align devices or objects to ensure defined positions relative to each other
• CPC Class Codes: B01L 2200/027 for microfluidic devices
• CPC Class Codes: B01L 2200/0605 Metering of fluids
• CPC Class Codes: B01L 2200/10 Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
• CPC Class Codes: B01L 2300/0681 Filter
• CPC Class Codes: B01L 2300/0861 Configuration of multiple channels and/or chambers in a single devices
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2300/123 Flexible; Elastomeric
• CPC Class Codes: B01L 2300/14 : Means for pressure control
• CPC Class Codes: B01L 2300/18 : Means for temperature control
• CPC Class Codes: B01L 2400/0481 : squeezing of channels or chambers
• CPC Class Codes: B01L 2400/0655 : pinch valves
• CPC Class Codes: B01L 2400/0688 : surface tension valves, capillary stop, capillary break
• CPC Class Codes: B01L 3/502707 : characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/50273 : characterised by the means or forces applied to move the fluids micropumps F04B19/006, of the membrane type F04B43/043
• CPC Class Codes: B01L 3/502738 : characterised by integrated valves microvalves F16K99/0001
• CPC Class Codes: B01L 7/54 : using spatial temperature gradients
• CPC Class Codes: B01L 9/527 : for microfluidic devices, e.g. used for lab-on-a-chip
• CPC Class Codes: B32B 2037/1081 : using a magnetic force
• CPC Class Codes: F04B 19/006 : Micropumps F04B43/043 and F04B43/095 take precedence
• CPC Class Codes: F04B 43/043 : Micropumps
• CPC Class Codes: F04B 43/14 : having plate-like flexible members
• CPC Class Codes: F15C 3/00 : Circuit elements having moving parts valves, construction of valves F16K
• CPC Class Codes: F16K 2099/0074 : using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0076 : using electrical discharge machining [EDM], milling or drilling
• CPC Class Codes: F16K 2099/0078 : using moulding or stamping
• CPC Class Codes: F16K 2099/008 : Multi-layer fabrications
• CPC Class Codes: F16K 2099/0084 : Chemistry or biology, e.g. "lab-on-a-chip" technology
• CPC Class Codes: F16K 99/0001 : Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0026 : Valves using channel deformation
• CPC Class Codes: F16K 99/0059 : actuated by a pilot fluid
• CPC Class Codes: Y10T 137/2202 : By movable element
• CPC Class Codes: Y10T 137/2224 : Structure of body of device
• CPC Class Codes: Y10T 137/87885 : Sectional block structure

Abstract

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Claims

1. A microfluidic structure comprising:

an underlying substrate;

a first elastomer layer having a first Young'"'"'s modulus between about 10 Pa and about 100 GPa overlying the substrate, the first elastomer layer bearing in a bottom surface a first recess; and

a second elastomer layer having a second Young'"'"'s modulus between about 10 Pa and about 100 GPa overlying the first elastomer layer, the second elastomer layer bearing in a bottom surface a second recess having an arched ceiling; and

a membrane portion of the first elastomer layer defined between the first recess and the second recess, the membrane portion deflectable upward into the second recess to conform with and seal against the arched ceiling.

2. The structure of claim 1 wherein the second elastomer layer is formed by curing an elastomer material against a nonelastomer mold bearing a convex feature.

3. The structure of claim 1 wherein the first recess comprises a control channel and the second recess comprises a flow channel.

4. The structure of claim 1 wherein the membrane portion is deflectable into the second recess in response to an elevated pressure within the first recess.

5. The microfluidic structure of claim 1 wherein:

the first Young'"'"'s modulus is between about 20 Pa and about 1 GPa; and

the second Young'"'"'s modulus is between about 20 Pa and about 1 GPa.

6. The microfluidic structure of claim 1 wherein:

the first Young'"'"'s modulus is between about 50 Pa and about 10 MPa; and

the second Young'"'"'s modulus is between about 50 Pa and about 10 MPa.

7. The microfluidic structure of claim 1 wherein:

the first Young'"'"'s modulus is between about 100 Pa and about 1 MPa; and

the second Young'"'"'s modulus is between about 100 Pa and about 1 MPa.

8. The microfluidic structure of claim 1 wherein the arched ceiling of the second recess comprises a continuous arched ceiling.

9. The microfluidic structure of claim 1 wherein the membrane portion of the first elastomer layer comprises an integral portion of the first elastomer layer.

10. A microfluidic structure comprising:

an underlying substrate;

a first elastomer layer having a first Young'"'"'s modulus between about 10 Pa and about 100 GPa overlying the substrate, the first elastomer layer bearing in a bottom surface a first recess, the first recess patterned in a plurality of channels splitting into a plurality of parallel branches, the parallel branches reuniting; and

a second elastomer layer having a second Young'"'"'s modulus between about 10 Pa and about 100 GPa overlying the first elastomer layer, the second elastomer layer bearing in a bottom surface a second recess, the second recess patterned in a plurality of parallel channels oriented orthogonal to the parallel branches; and

membrane portions of the first elastomer layer defined between a widened portion of the parallel channels and the underlying parallel branches, the membrane portions deflectable into the parallel branches to control a flow of fluid through the parallel branches.

11. The microfluidic structure of claim 10 wherein:

the first Young'"'"'s modulus is between about 20 Pa and about 1 GPa; and

the second Young'"'"'s modulus is between about 20 Pa and about 1 GPa.

12. The microfluidic structure of claim 10 wherein:

the first Young'"'"'s modulus is between about 50 Pa and about 10 MPa; and

the second Young'"'"'s modulus is between about 50 Pa and about 10 MPa.

13. The microfluidic structure of claim 10 wherein:

the first Young'"'"'s modulus is between about 100 Pa and about 1 MPa; and

the second Young'"'"'s modulus is between about 100 Pa and about 1 MPa.

14. The microfluidic structure of claim 10 wherein the membrane portions of the first elastomer layer comprises integral portions of the first elastomer layer.