Electrical feedthrough assembly
First Claim
Patent Images
1. An electrical feedthrough comprising:
- a ceramic body; and
ribbon vias extending through the ceramic body, the ribbon vias extending out of at least one surface of the ceramic body, wherein a width of the ribbon vias vary through a thickness of the ceramic body, wherein the ribbon vias comprise a fan out configuration with ribbon vias spaced more densely on one side of the ceramic body and spaced farther apart on an opposite side of the ceramic body.
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Abstract
An electrical feedthrough includes a ceramic body and a ribbon via extending through the ceramic body, an interface between the ribbon via and the ceramic body being sealed using partial transient liquid phase bonding. The ribbon via extends out of the ceramic body and makes an electrical connection with an external device.
136 Citations
23 Claims
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1. An electrical feedthrough comprising:
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a ceramic body; and ribbon vias extending through the ceramic body, the ribbon vias extending out of at least one surface of the ceramic body, wherein a width of the ribbon vias vary through a thickness of the ceramic body, wherein the ribbon vias comprise a fan out configuration with ribbon vias spaced more densely on one side of the ceramic body and spaced farther apart on an opposite side of the ceramic body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. An electrical feedthrough assembly comprising:
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a ceramic body; and a plurality of ribbon vias extending through the ceramic body, the plurality of ribbon vias comprising a micro-machined platinum foil having a thickness of less than 100 microns and plated with a layer of niobium such that when the ceramic body and plurality of ribbon vias are heated above a eutectic point, interfaces between the plurality of ribbon vias and the ceramic body are sealed by a partial transient liquid phase bond such that voids surrounding the plurality of ribbon vias are filled by an alloy of platinum and niobium, in which the plurality of ribbon vias extend out of two sides of the ceramic body and are configured to make electrical connections through the ceramic body between an internal electrical device and an external electrical device.
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22. An electrical feedthrough comprising:
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a ceramic body; and ribbon vias extending through the ceramic body and extending out of at least one surface of the ceramic body, wherein a width of the ribbon vias vary through a thickness of the ceramic body, wherein the ribbon vias comprise; a first planar group of ribbon vias is formed in a left portion of the ceramic body, the first group comprising serpentine vias with a right turn and a left turn; and a second planar group of ribbon vias is formed in a right portion of the ceramic body, the second group comprising serpentine vias with a right turn and a left turn; wherein the serpentine vias comprise a diffusion path length at an interface between the vias and ceramic body, the diffusion path length being greater than a thickness of the ceramic body.
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23. An electrical feedthrough comprising:
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a ceramic body; and a ribbon via extending through the ceramic body, an interface between the ribbon via and the ceramic body comprising a partial transient liquid phase bond, the ribbon via extending out of at least one surface of the ceramic body, wherein a width of the ribbon via varies through a thickness of the ceramic body; and a ground plane embedded in the ceramic body and underlying the ribbon via.
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Specification