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Apparatus and method for surface modification using charged particle beams

  • US 8,552,406 B2
  • Filed: 02/18/2011
  • Issued: 10/08/2013
  • Est. Priority Date: 11/07/2005
  • Status: Active Grant
First Claim
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1. A method for charge neutralization of a charged particle beam, comprising:

  • a) maintaining a sample under an initial low pressure within a chamber;

    b) injecting a gas into the chamber directly onto a small portion of the sample creating a micro-environment on the small portion of the sample, the micro-environment having a gas concentration higher than elsewhere on the sample, while the sample outside the small portion is maintained closer to the initial low pressure; and

    c) passing the charged particle beam through the micro-environment and onto the small portion of the sample for promoting charge neutralization in the micro-environment.

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