Anchor design and method for MEMS transducer apparatuses

• US 8,553,389 B1
• Filed: 08/19/2010
• Issued: 10/08/2013
• Est. Priority Date: 08/19/2010
• Status: Active Grant

• Current Assignee: Movella Incorporated (Movella Holdings, Inc.)
• Original Assignee: mCube, Inc.
• Inventors: Koury, Daniel N. Jr., Flannery, Anthony F. Jr.
• Primary Examiner(s): Gandhi, Jayprakash N
• Assistant Examiner(s): DANG, HUNG Q
• Application Number:
  US12/859,647
• Time in Patent Office: 1,146 Days
• Field of Search: 361/280, 361/763, 361/769, 361/787, 361/807, 257/E21.19, 257/415, 257/E21.5
• US Class Current: 361/287
• CPC Class Codes: B81C 1/00142 Bridges deformable micromirrors G02B26/0841
• CPC Class Codes: B81C 1/00261 Processes for packaging MEMS devices MEMS packages B81B7/0032, packaging of smart-MEMS B81C1/0023
• CPC Class Codes: B81C 1/00492 Processes for surface micromachining not provided for in groups B81C1/0046 - B81C1/00484
• CPC Class Codes: H01G 4/40 Structural combinations of fixed capacitors with other electric elements, the structure mainly consisting of a capacitor, e.g. RC combinations
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H01G 5/40 Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations

Abstract

An improved MEMS transducer apparatus and method is provided. The apparatus includes a movable base structure having a base surface region. An anchor structure is disposed within a substantially circular portion of the surface region typically at or near the center of the surface region. A spring structure is coupled to the anchor structure and at least one portion of the base surface region. A capacitor, having a fixed capacitor element and a movable capacitor element, are disposed near the base surface region. The fixed capacitor element can be coupled to the anchor structure and the movable capacitor element can be spatially disposed on a portion of the base surface region near the anchor structure.

Claims

1. An apparatus disposed upon a substrate member having a surface region, the apparatus comprising:

a movable base structure having a base surface region, the movable base structure having a center cavity with a cavity surface region;

at least one center anchor structure spatially disposed within a substantially circular portion of the surface region, the anchor structure(s) being configured within a vicinity of the center of the surface region that is within the center cavity;

at least one spring structure coupled to at least one portion of the cavity surface region, the spring structure(s) being coupled to the center anchor structure(s); and

at least one capacitor element, the capacitor element(s) being spatially disposed within a vicinity of the anchor structure(s), each of the capacitor element(s) having a fixed capacitor element and a movable capacitor element, the fixed capacitor element(s) being coupled to the center anchor structure(s), the movable capacitor element(s) being spatially disposed on a portion of the cavity surface region within a vicinity of the center anchor structure(s).

2. The apparatus of claim 1 wherein each of the capacitor element(s) comprises a differential capacitor element pair.

3. The apparatus of claim 1 wherein the capacitor element(s) comprise a silicon material, a dielectric, a polymer, or metal material.

4. The apparatus of claim 1 wherein the capacitor element(s) are spatially disposed within a substantially circular portion of the surface region, the capacitor element(s) being configured within a vicinity of the center of the surface region within the center cavity.

5. The apparatus of claim 1 wherein the movable base structure comprises a silicon material, a polymer, a dielectric, or a metal material.

6. The apparatus of claim 1 wherein the anchor structure(s) comprise a silicon material, a polymer, a dielectric, or a metal material.

7. The apparatus of claim 1 wherein the anchor structure(s) are formed overlying an oxide material overlying the substrate.

8. The apparatus of claim 1 wherein the anchor structure(s) are configured such that the maximum distance between each anchor structure is minimized.

9. The apparatus of claim 1 wherein the anchor structure(s) are configured such that the apparatus is tolerant of strain or deformation over temperature.

10. The apparatus of claim 1 wherein the spring structure(s) comprise a silicon material, a polymer, a dielectric, or a metal material.

11. An apparatus disposed upon a substrate member having a surface region, the apparatus comprising:

a rectangular movable base structure having a base surface region, the rectangular movable base structure having a center cavity with a cavity surface region;

four center anchor structures spatially disposed within a substantially circular portion of the surface region, the center anchor structures being configured within a vicinity of the center of the surface region within the center cavity;

four spring structures each of which are coupled to separate at least portions of the cavity surface region, the spring structures being coupled to the center anchor structures; and

at least one capacitor element coupled to each of the center anchor structures, the capacitor elements being spatially disposed within a vicinity of the substantially circular portion within the center cavity, each of the capacitor elements having a fixed capacitor element and a movable capacitor element, the fixed capacitor elements being coupled to the center anchor structures within a vicinity of the center of the substantially circular portion, the movable capacitor elements being spatially disposed on a portion of the cavity surface region within a vicinity of the center anchor structures and outside of the substantially circular portion.

12. The apparatus of claim 11 wherein each of the capacitor elements comprises a differential capacitor element pair.

13. The apparatus of claim 11 wherein the capacitor elements comprise a silicon material, a dielectric, a polymer, or metal material.

14. The apparatus of claim 11 wherein the rectangular movable base structure comprises a silicon material, a polymer, a dielectric, or a metal material.

15. The apparatus of claim 11 wherein the center anchor structures comprise a silicon material, a polymer, a dielectric, or a metal material.

16. The apparatus of claim 11 wherein the center anchor structures are configured such that the maximum distance between each center anchor structure is minimized.

17. The apparatus of claim 11 wherein the center anchor structures are configured such that the apparatus is tolerant of strain or deformation over temperature.

18. The apparatus of claim 11 wherein the spring structures comprise a silicon material, a polymer, a dielectric, or a metal material.

19. The apparatus of claim 11 wherein the spring structures comprise torsion springs or bending springs.