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Anchor design and method for MEMS transducer apparatuses

  • US 8,553,389 B1
  • Filed: 08/19/2010
  • Issued: 10/08/2013
  • Est. Priority Date: 08/19/2010
  • Status: Active Grant
First Claim
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1. An apparatus disposed upon a substrate member having a surface region, the apparatus comprising:

  • a movable base structure having a base surface region, the movable base structure having a center cavity with a cavity surface region;

    at least one center anchor structure spatially disposed within a substantially circular portion of the surface region, the anchor structure(s) being configured within a vicinity of the center of the surface region that is within the center cavity;

    at least one spring structure coupled to at least one portion of the cavity surface region, the spring structure(s) being coupled to the center anchor structure(s); and

    at least one capacitor element, the capacitor element(s) being spatially disposed within a vicinity of the anchor structure(s), each of the capacitor element(s) having a fixed capacitor element and a movable capacitor element, the fixed capacitor element(s) being coupled to the center anchor structure(s), the movable capacitor element(s) being spatially disposed on a portion of the cavity surface region within a vicinity of the center anchor structure(s).

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