Displays with embedded MEMS sensors and related methods
First Claim
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1. A semiconductor device, comprising:
- a substrate;
a first MEMS device of one or more MEMS devices over the substrate;
a pixel array over the substrate, the pixel array comprising one or more pixels; and
a display comprising at least a portion of the one or more pixels of the pixel array; and
one or more pressure sensors;
wherein;
a first pressure sensor of the one or more pressure sensors comprises the first MEMS device;
the first pressure sensor is configured to detect when the display is contacted proximate to the first pressure sensor;
the first MEMS device comprises;
a capacitor having;
an electrically conductive material located over the substrate;
a sensor membrane movably suspended over the electrically conductive material; and
a first dielectric located over the electrically conductive material and under the sensor membrane;
anda round wall structure configured to support the sensor membrane over a gap between the electrically conductive material and the sensor membrane;
andthe sensor membrane is configured to move towards the electrically conductive material when the display is contacted proximate to the first pressure sensor.
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Abstract
Embodiments of displays with embedded MEMS sensors and related methods are described herein. Other embodiments and related methods are also disclosed herein.
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Citations
38 Claims
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1. A semiconductor device, comprising:
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a substrate; a first MEMS device of one or more MEMS devices over the substrate; a pixel array over the substrate, the pixel array comprising one or more pixels; and a display comprising at least a portion of the one or more pixels of the pixel array; and one or more pressure sensors; wherein; a first pressure sensor of the one or more pressure sensors comprises the first MEMS device; the first pressure sensor is configured to detect when the display is contacted proximate to the first pressure sensor; the first MEMS device comprises; a capacitor having; an electrically conductive material located over the substrate; a sensor membrane movably suspended over the electrically conductive material; and a first dielectric located over the electrically conductive material and under the sensor membrane; and a round wall structure configured to support the sensor membrane over a gap between the electrically conductive material and the sensor membrane; and the sensor membrane is configured to move towards the electrically conductive material when the display is contacted proximate to the first pressure sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method comprising:
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providing a substrate; forming a pixel array over the substrate, the pixel array comprising one or more pixels; forming a MEMS array over the substrate; providing a display comprising at least a portion of the one or more pixels; and providing one or more pressure sensors; wherein; forming the MEMS array over the substrate comprises; forming at least a first MEMS device of the one or more MEMS devices; a first pressure sensor of the one or more pressure sensors comprises the first MEMS device; the first pressure sensor is configured to detect when the display is contacted proximate to the first pressure sensor; the first MEMS device comprises; a capacitor having; an electrically conductive layer over the substrate; a sensor membrane movably suspended over the electrically conductive layer; and a first dielectric located over the electrically conductive layer and under the sensor membrane; and a round wall structure configured to support the sensor membrane over a gap between the electrically conductive layer and the sensor membrane; and the sensor membrane is configured to move towards the electrically conductive layer when the display is contacted proximate to the first pressure sensor. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 38)
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35. A semiconductor device, comprising:
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a substrate; a first MEMS device of one or more MEMS devices over the substrate; a pixel array over the substrate, the pixel array comprising one or more pixels; and one or more pressure sensors; wherein; a first pressure sensor of the one or more pressure sensors comprises the first MEMS device; the first MEMS device comprises a capacitor having; an electrically conductive material located over the substrate; a sensor membrane movably suspended over the electrically conductive material; and a round wall structure configured to support the sensor membrane over a gap between the electrically conductive material and the sensor membrane; and the sensor membrane is configured to move towards the electrically conductive material when the display is contacted proximate to the first pressure sensor. - View Dependent Claims (36, 37)
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Specification