Nitride semiconductor light emitting device and fabrication method thereof
First Claim
1. A light emitting device comprising:
- a substrate having a plurality of patterns;
a first conductive semiconductor layer on a buffer layer, wherein the first conductive semiconductor layer includes first to third GaN-based layers, wherein the first GaN-based layer includes Si dopant, the second Ga-based layer includes a dopant having a lower concentration of Si than the first GaN-based layer, and the third GaN-based layer includes In material, wherein the first conductive semiconductor layer further comprises a fourth GaN-based layer including Al material, and wherein the fourth GaN-based layer has a planar surface;
an active layer on the third GaN-based layer of the first conductive semiconductor layer, wherein the active layer comprises a single quantum well layer or a multi quantum well layer of InxGa1-xN/InyGa1-yN; and
a second conductive semiconductor layer on the active layer.
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Abstract
The present invention relates to a nitride semiconductor light emitting device including: a substrate having a predetermined pattern formed on a surface thereof by an etch; a protruded portion disposed on a non-etched region of the substrate, and having a first buffer layer and a first nitride semiconductor layer stacked thereon; a second buffer layer formed on the etched region of the substrate; a second nitride semiconductor layer formed on the second buffer layer and the protruded portion; a third nitride semiconductor layer formed on the second nitride semiconductor layer; an active layer formed on the third nitride semiconductor layer to emit light; and a fourth nitride semiconductor layer formed on the active layer. According to the present invention, the optical extraction efficiency of the nitride semiconductor light emitting device can be enhanced.
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Citations
14 Claims
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1. A light emitting device comprising:
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a substrate having a plurality of patterns; a first conductive semiconductor layer on a buffer layer, wherein the first conductive semiconductor layer includes first to third GaN-based layers, wherein the first GaN-based layer includes Si dopant, the second Ga-based layer includes a dopant having a lower concentration of Si than the first GaN-based layer, and the third GaN-based layer includes In material, wherein the first conductive semiconductor layer further comprises a fourth GaN-based layer including Al material, and wherein the fourth GaN-based layer has a planar surface; an active layer on the third GaN-based layer of the first conductive semiconductor layer, wherein the active layer comprises a single quantum well layer or a multi quantum well layer of InxGa1-xN/InyGa1-yN; and a second conductive semiconductor layer on the active layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification