Test method of microstructure body and micromachine
First Claim
1. A method for testing a microstructure body, comprising the steps of:
- connecting a first antenna to a first microstructure body including a first conductive layer, a second conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer and having a known characteristic;
connecting a second microstructure body having the same structure as that of the first microstructure body to a second antenna having the same structure as that of the first antenna;
supplying electric power to the first microstructure body wirelessly through the first antenna;
detecting an electromagnetic wave generated from the first antenna as a reference characteristic of the second microstructure body;
supplying electric power to the second microstructure body wirelessly through the second antenna;
detecting an electromagnetic wave generated from the second antenna as a characteristic of the second the microstructure body; and
evaluating a characteristic of the second microstructure body by comparing the detected characteristic of the second microstructure body with the reference characteristic of the second microstructure body.
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Abstract
It is an object to provide a test method of a process, an electric characteristic, and a mechanical characteristic of a structure body in a micromachine without contact. A structure body including a first conductive layer, a second conductive layer provided in parallel to the first conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer is provided; an antenna connected to the structure body is provided; electric power is supplied to the structure body wirelessly through the antenna; and an electromagnetic wave generated from the antenna is detected as a characteristic of the structure body.
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Citations
16 Claims
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1. A method for testing a microstructure body, comprising the steps of:
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connecting a first antenna to a first microstructure body including a first conductive layer, a second conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer and having a known characteristic; connecting a second microstructure body having the same structure as that of the first microstructure body to a second antenna having the same structure as that of the first antenna; supplying electric power to the first microstructure body wirelessly through the first antenna; detecting an electromagnetic wave generated from the first antenna as a reference characteristic of the second microstructure body; supplying electric power to the second microstructure body wirelessly through the second antenna; detecting an electromagnetic wave generated from the second antenna as a characteristic of the second the microstructure body; and evaluating a characteristic of the second microstructure body by comparing the detected characteristic of the second microstructure body with the reference characteristic of the second microstructure body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for testing a microstructure body, comprising the steps of:
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connecting a first antenna to a first microstructure body including a first conductive layer, a second conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer and having a known characteristic; connecting a second microstructure body having the same structure as that of the first microstructure body to a second antenna having the same structure as that of the first antenna; supplying electric power to the first microstructure body through the first antenna; detecting an electromagnetic wave generated from the first antenna as a reference characteristic of the second microstructure body; supplying electric power to the second microstructure body through the second antenna; detecting an electromagnetic wave generated from the second antenna as a characteristic of the second the microstructure body; and evaluating a characteristic of the second microstructure body by comparing the detected characteristic of the second microstructure body with the reference characteristic of the second microstructure body. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification