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EL display device, driving method thereof, and electronic equipment provided with the EL display device

  • US 8,558,773 B2
  • Filed: 02/26/2013
  • Issued: 10/15/2013
  • Est. Priority Date: 06/21/1999
  • Status: Expired due to Fees
First Claim
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1. A display device comprising:

  • a first glass substrate;

    a base insulating film over and in contact with the first glass substrate, the base insulating film comprising silicon;

    a semiconductor film over the base insulating film, the semiconductor film comprising polysilicon;

    a gate insulating film over the semiconductor film, the gate insulating film comprising a first insulating film containing silicon and oxygen and a second insulating film containing silicon and nitrogen;

    a gate electrode over the gate insulating film, the gate electrode comprising molybdenum;

    a third insulating film over the gate electrode, the third insulating film being a stack comprising silicon-containing films each selected from a silicon oxide film, a silicon nitride film, and a silicon nitride oxide film;

    a source electrode and a drain electrode over the third insulating film, the source electrode and the drain electrode each comprising a first titanium film, an aluminum film over the first titanium film, and a second titanium film over the aluminum film;

    a fourth insulating film over the source electrode and the drain electrode, the fourth insulating film comprising an organic resin;

    a pixel electrode over the fourth insulating film, the pixel electrode comprising a metal and being electrically connected to one of the source electrode and the drain electrode;

    a fifth insulating film over the fourth insulating film and having an opening in which the pixel electrode is exposed, wherein the fifth insulating film comprises an organic resin, covers an edge of the pixel electrode, and has a tapered shape in a region surrounding the opening;

    an EL layer over the pixel electrode and the fifth insulating film; and

    a conductive film over the EL layer, the conductive film being capable of transmitting light emitted from the EL layer.

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