Lithographic apparatus and device manufacturing method

• US 8,558,989 B2
• Filed: 08/04/2010
• Issued: 10/15/2013
• Est. Priority Date: 11/12/2002
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Lof, Joeri, Bijlaart, Erik Theodorus Maria, Butler, Hans, Donders, Sjoerd Nicolaas Lambertus, Hoogendam, Christiaan Alexander, Kolesnychenko, Aleksey, Loopstra, Erik Roelof, Meijer, Hendricus Johannes Maria, Mertens, Jeroen Johannes Sophia Maria, Mulkens, Johannes Catharinus Hubertus, Ritsema, Roelof Aeilko Siebrand, Van Schaik, Frank, Sengers, Timotheus Franciscus, Simon, Klaus, De Smit, Joannes Theodoor, Straaijer, Alexander, Streefkerk, Bob, Van Santen, Helmar
• Primary Examiner(s): Kim, Peter B
• Application Number:
  US12/850,472
• Publication Number:
  US 20110170077A1
• Time in Patent Office: 1,168 Days
• Field of Search: 355/55, 355/53, 355/30, 355/63, 355/72, 355/75, 355/77, 250/548, 250/492.2, 359/380
• US Class Current: 355/53
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/7085 Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
• CPC Class Codes: G03F 7/70866 of mask or workpiece

Abstract

A lithographic projection apparatus is disclosed in which a space between the projection system and the substrate is filled with a liquid. An edge seal member at least partly surrounds the substrate or other object on a substrate table to prevent liquid loss when edge portions of the substrate or other object are, for example, imaged or illuminated.

Claims

1. A lithographic projection apparatus comprising:

a projection system configured to project a patterned beam onto a target portion of a substrate; and

a substrate table configured to hold the substrate, the substrate table comprising;

an edge seal member configured to at least partly surround an edge of the substrate, an object positioned on the substrate table, or both, and

a port positioned to remove fluid from a gap between the edge seal member and the substrate, the object, or both, and positioned at a side of the gap opposite the projection system and below the substrate, the object, or both; and

a liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space between the projection system and the substrate, the object, or both, the liquid supply system comprising an inlet, located above the substrate table, to supply the liquid to the space.

2. The apparatus according to claim 1, wherein the substrate table further comprises a channel positioned radially inwardly of the port, the channel being connected to a gas source such that on removal of fluid through the port a flow of gas radially outwardly from the channel towards the port can be established.

3. The apparatus according to claim 2, wherein one or more burls configured to be in contact with the substrate, the object, or both, are present radially outwardly of the channel and inwardly of the port.

4. The apparatus according to claim 1, wherein the substrate table comprises a portion which extends below the substrate, the object, or both, and is radially outwardly of the port.

5. The apparatus according to claim 4, wherein the portion has one or more parts which extend up to the substrate, the object, or both, to at least partly support the substrate, the object, or both.

6. The apparatus according to claim 4, wherein the portion is part of a pimple table which supports the substrate.

7. The apparatus according to claim 1, further comprising a compartment in the substrate table in fluid connection with the gap via the port and with a suction source.

8. The apparatus according to claim 1, wherein the port is annular.

9. The apparatus according to claim 1, wherein the port is discontinuous.

10. The apparatus according to claim 1, wherein the port is continuous.

11. The apparatus according to claim 1, wherein the port is positioned adjacent an edge portion of the edge seal member.

12. The apparatus according to claim 1, wherein the object comprises a sensor.

13. The apparatus according to claim 1, wherein the edge seal member is glued to the substrate, the object, or both, around a periphery of the substrate, the object, or both.

14. A device manufacturing method, comprising:

providing a liquid in a space between a projection system and a substrate, an object, or both, using an inlet located above the substrate, the object, or both, wherein an edge of the substrate, the object, or both, is at least partly surrounded by a body;

projecting a patterned beam of radiation, through a liquid, onto a portion of the substrate, the object, or both; and

removing fluid from a gap between the body and the substrate, the object, or both, using a port positioned at a side of the gap opposite the projection system and below the substrate, the object, or both.

15. The method of claim 14, further comprising establishing a flow of gas radially outwardly from a channel, positioned radially inwardly of the port, towards the port.

16. The method of claim 14, wherein a portion of a movable table to support the substrate, the object, or both extends below the substrate, the object, or both, and is radially outwardly of the port.

17. The method of claim 16, wherein the portion has one or more parts which extend up toward the substrate, the object, or both.

18. The method of claim 17, wherein the portion is part of a pimple table which supports the substrate.

19. The method of claim 14, comprising removing the fluid using the port via a compartment in a movable table in fluid connection with a suction source.

20. The method of claim 14, wherein the port is annular.

21. The method of claim 14, wherein the port is discontinuous.

22. The method of claim 14, wherein the port is continuous.

23. The method of claim 14, wherein the port is positioned adjacent an edge portion of the body.

24. The method of claim 14, wherein the object comprises a sensor.

25. The method of claim 14, wherein the body is separable from a movable table supporting the substrate, the object, or both, and is movable relative to the substrate, the object, or both.

26. The method of claim 14, wherein providing the liquid comprises providing the liquid such that the liquid covers a cross-sectional area smaller than the area of the top surface of the substrate.

27. A lithographic projection apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a substrate, of a sensor, or both;

a movable table, comprising;

a body having an aperture to contain the substrate, the sensor, or both, therein, and

an outlet located below the substrate and/or sensor to remove liquid entering a gap between a lateral edge of the aperture and a lateral edge of the substrate and/or sensor; and

a liquid supply system configured to provide a liquid, through which the beam is to be projected, in a space between the projection system and the table, the liquid supply system comprising an inlet, located above the substrate table, to supply the liquid to the space.

28. The apparatus according to claim 27, wherein the liquid supply system further comprises a liquid confinement structure positioned adjacent a final surface of the projection system and extending along at least a part of a boundary of the space, wherein, when the liquid is in the space, the cross-sectional area of the liquid in the space is smaller than the area of the substrate.

29. The apparatus according to claim 27, wherein the table further comprises a channel positioned radially inwardly of the outlet.

30. The apparatus according to claim 27, wherein the outlet is located in a groove in the table.

31. The apparatus according to claim 30, wherein the groove is annular.

32. The apparatus according to claim 27, wherein the outlet is discontinuous.

33. The apparatus according to claim 27, wherein the body is separable from the table and movable relative to the substrate, the sensor, or both.