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Method for producing MEMS structures, and MEMS structure

  • US 8,563,344 B2
  • Filed: 11/17/2011
  • Issued: 10/22/2013
  • Est. Priority Date: 11/26/2010
  • Status: Active Grant
First Claim
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1. A method for producing microelectromechanical structures in a substrate, comprising:

  • arranging at least one metal-plated layer on a main surface of the substrate in a structure pattern;

    leaving substrate webs open beneath the structure pattern region by introducing first trenches into the substrate perpendicular to a surface normal of the main surface in a region surrounding the structure pattern;

    coating the walls of the first trenches perpendicular to the surface normal of the main surface with a passivation layer; and

    introducing cavity structures into the substrate at the base of the first trenches in a region beneath the structure pattern region.

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