Integrated MEMS device and method of use
First Claim
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1. An integrated MEMS system comprising:
- a MEMS resonator; and
at least one MEMS device coupled to the MEMS resonator, wherein the MEMS resonator and the at least one MEMS device are fabricated on a common substrate, wherein a gain peak of the MEMS resonator tracks with an offset with respect to a gain peak of the at least one MEMS device to optimize the performance of the at least one MEMS device.
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Abstract
An integrated MEMS device is disclosed. The system comprises a MEMS resonator; and a MEMS device coupled to a MEMS resonator. The MEMS resonator and MEMS device are fabricated on a common substrate so that certain characteristics of the MEM resonator and MEMS device track each other as operating conditions vary.
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Citations
18 Claims
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1. An integrated MEMS system comprising:
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a MEMS resonator; and at least one MEMS device coupled to the MEMS resonator, wherein the MEMS resonator and the at least one MEMS device are fabricated on a common substrate, wherein a gain peak of the MEMS resonator tracks with an offset with respect to a gain peak of the at least one MEMS device to optimize the performance of the at least one MEMS device. - View Dependent Claims (2, 3, 4, 5)
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6. A MEMS Lorentz-force magnetometer system comprising:
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a MEMS resonator; an oscillator coupled to the MEMS resonator; and a MEMS device coupled to the oscillator, wherein the MEMS resonator and the MEMS device are fabricated on a common substrate, wherein a gain peak of the MEMS resonator tracks with an offset with respect to a gain peak of the at least one MEMS device to optimize the performance of the at least one MEMS device; the MEMS device further comprising a flexible element, the oscillator operable to produce an oscillation substantially at a resonant frequency of the MEMS resonator, the oscillator operable to drive a current in the flexible element, the flexible element operable to deflect in response to a Lorentz force. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14)
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15. A method comprising:
fabricating a MEMS resonator and at least one MEMS device on a common substrate at substantially the same time, wherein there is a correlation between at least one characteristic of the MEMs resonator and at least one characteristic of the MEMS device, wherein the step of fabricating is effective to substantially track with an offset a gain peak of the MEMS resonator with respect to a gain peak of the at least one MEMS device to optimize the performance of the at least one MEMS device. - View Dependent Claims (16, 17, 18)
Specification