×

Integrated circuit arrays and semiconductor constructions

  • US 8,569,831 B2
  • Filed: 05/27/2011
  • Issued: 10/29/2013
  • Est. Priority Date: 05/27/2011
  • Status: Active Grant
First Claim
Patent Images

1. An integrated circuit array having rows and columns, comprising:

  • digit lines under vertically-oriented transistors;

    the digit lines interconnecting the transistors along columns of the array and being entirely composed of one or more metal-containing materials;

    the vertically-oriented transistors having bottom source/drain regions electrically coupled to the digit lines;

    wherein the digit lines are over a semiconductor deck comprising semiconductor material;

    wherein electrically insulative regions are directly between the digit lines and the semiconductor material of the deck; and

    wherein the electrically insulative regions include gas-filled cavities.

View all claims
  • 8 Assignments
Timeline View
Assignment View
    ×
    ×