Capacitive sensing system

• US 8,570,055 B2
• Filed: 12/23/2010
• Issued: 10/29/2013
• Est. Priority Date: 12/31/2009
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: Mapper Lithography IP B.V (ASML Holding NV)
• Inventors: De Boer, Guido, Van Baar, Johnny Joannes Jacobus, Padhye, Kaustubh Prabodh, Mossel, Robert, Vergeer, Niels, Steenbrink, Stijn Willem Herman Karel
• Primary Examiner(s): Nguyen, Vincent Q
• Application Number:
  US12/977,240
• Publication Number:
  US 20110193574A1
• Time in Patent Office: 1,041 Days
• Field of Search: 324/658, 324/686, 324/688
• US Class Current: 324/686
• CPC Class Codes: G01B 7/023 for measuring distance between sensor and object G01B7/082 and G01B7/102 take precedence
• CPC Class Codes: G01D 3/036 on measuring arrangements themselves
• CPC Class Codes: G01D 5/2417 by varying separation
• CPC Class Codes: G03F 9/7026 Focusing
• CPC Class Codes: G03F 9/7053 Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves

Abstract

A capacitive sensing system with a sensor having a thin film structure. The thin film structure includes a first insulating layer and a first conductive film having a sensing electrode formed on a first surface of the first insulating layer and a second conductive film having a back guard electrode. The back guard electrode is formed in a single plane and has a peripheral portion in the same plane, and is disposed on a second surface of the first insulating layer and a first surface of a second insulating layer or protective layer. The peripheral portion of the back guard electrode extends beyond the sensing electrode to form a side guard electrode which substantially or completely surrounds the sensing electrode.

Claims

1. A capacitive sensing system comprising one or more sensors having a thin film structure, the thin film structure comprising

a first conductive film comprising a separate sensing electrode for each of the one or more sensors;

a second conductive film comprising a separate back guard electrode for each of the one or more sensors; and

a first insulating film arranged between the first conductive film and the second conductive film;

wherein the sensing electrode is smaller than the back guard electrode, so that a peripheral portion of the back guard electrode extends laterally beyond the sensing electrode to form a side guard electrode which substantially surrounds the sensing electrode.

2. The capacitive sensing system of claim 1, wherein the thin film structure further comprises an elongated connecting member comprising a flexible membrane on which conductive tracks are printed or affixed, the conductive tracks electrically connected to the sensing electrode and the back guard electrode of the sensor at one end and a connector at the other end.

3. The capacitive sensing system of claim 1, wherein the insulating film comprises a first area where the sensing electrode is formed and a second elongated area on which the conductive tracks are formed.

4. The capacitive sensing system of claim 1, wherein the thin film structure further comprises:

a third conductive film comprising a shield electrode for one or more of the one or more sensors; and

a second insulating film arranged between the second conductive film and the third conductive film.

5. The capacitive sensing system of claim 4, wherein the thin film structure further comprises an elongated connecting member comprising a flexible membrane on which conductive tracks are printed or affixed, the conductive tracks electrically connected to the sensing electrode, the back guard electrode, and the shield electrode of the one or more sensors at one end and a connector at the other end.

6. The capacitive sensing of claim 5,

wherein the sensor is mounted to a structure and electrically connected to a triaxial cable, the shield electrode of the sensor being electrically connected to an outer conductor of the triaxial cable for making a connection to ground potential at an end of the cable remote from the sensors, and wherein the shield electrode of the sensor is not electrically connected to the structure at the sensor.

7. The capacitive sensing system of claim 4, wherein the sensor is connected to a triaxial cable, and wherein the shield electrode is electrically connected to an outer ground potential electrical conductor thereof.

8. The capacitive sensing system of claim 4, further comprising an AC power source for energizing the capacitive sensor, a signal processing circuit for processing signals from the sensor, and a triaxial cable for connecting the capacitive sensor to the AC power source and the signal processing circuit, wherein the cable has a center conductor, an outer conductor, and a shield conductor, the center conductor for electrically connecting the AC power source to the sensing electrode of the sensor, the outer conductor for electrically connecting to the back guard electrode of the sensor, and the shield conductor for electrically connecting the shield electrode of the sensor to a ground for the signal processing circuit at an end of the cable remote from the sensors.

9. The capacitive sensing system of claim 1, wherein the one or more sensors are connected to a triaxial cable, and wherein the electrodes of the one or more sensors are connected to corresponding conductors of the triaxial cable via a thin film connector element.

10. The capacitive sensing system of claim 9, wherein the electrodes of the one or more sensors are connected to the conductors of the cable via conductive tracks on the thin film connector element, the conductive tracks electrically connected to at least the sensing electrode and the back guard electrode of the sensor at one end and a connector at the other end.

11. The capacitive sensing system of claim 10, wherein one or more of the conductive tracks electrically connected to the back guard electrode overlies the conductive track connected to the sensing electrode, the conductive tracks electrically connected to the back guard electrode being wider so that a peripheral portion extends out from the edge of the conductive track connected to the sensing electrode.

12. The capacitive sensing system of claim 10, further comprising one or more conductive tracks connected to a shield electrode of the sensor at one end and electrically connected to an outer ground potential electrical conductor of the cable at the other end.

13. The capacitive sensing system of claim 12, wherein one or more of the conductive tracks electrically connected to the shield electrode overlies the conductive track connected to the back guard electrode and the conductive track connected to the sensing electrode.

14. The capacitive sensing system of claim 1, wherein the first insulating film is shared with additional capacitive sensors.

15. The capacitive sensing system of claim 1, wherein the thin film structure is flexible.

16. The capacitive sensing system of claim 1, wherein the first insulating film comprises a Kapton sheet.

17. The capacitive sensing system of claim 1, wherein the first insulating film comprises a pyrex layer.

18. A lithography system for exposing a target, the system comprising:

a projection lens system for focusing an exposure beam onto the target;

a moveable stage for carrying the target;

a capacitive sensing system according to claim 1 for making a measurement related to a distance between the projection lens system and the target; and

a control unit for controlling movement of the moveable stage to adjust a position of the target based at least in part on a signal from the capacitive sensing system.

19. The capacitive sensing system of claim 1, wherein the capacitive sensing system comprises one or more pairs of sensors, each sensor comprising a separate sensing electrode and a separate back guard electrode.

20. The capacitive sensing system of claim 1, wherein the one or more sensors are free of a side guard electrode.