Thermally compensating dieletric anchors for microstructure devices
First Claim
1. A microstructure device comprising:
- a substrate; and
a movable structure having an upper surface, a lower surface, a proximal portion, and a distal portion suspended above the substrate by at least one anchor homogenously formed from a dielectric material with a bottom portion having a bottom area of a bottom surface region attached to the substrate and an upper area of an upper surface region attached to the lower surface of the proximal portion of the movable structure, the at least one anchor further including a top portion having a lower area of a lower surface region attached to the upper surface of the proximal portion of the movable structure, wherein the lower surface region of the top portion and the upper surface region of the bottom portion are geometrically asymmetric.
4 Assignments
0 Petitions
Accused Products
Abstract
A microstructure device that includes at least one thermally compensating anchor for preventing undesirable thermal displacement or actuation during manufacturing or operation is disclosed. In particular, the microstructure device includes a substrate and a movable structure suspended above the substrate by at least one anchor. The anchor is attached to the substrate. The anchor also includes an upper area of an upper surface region of a bottom portion attached to a lower surface of a proximal portion of the movable structure. The anchor further includes a top portion having a lower area of a lower surface region attached to an upper surface of the proximal portion of the movable structure, wherein the lower surface region of the top portion and the upper surface region of the bottom portion are geometrically asymmetric.
-
Citations
27 Claims
-
1. A microstructure device comprising:
-
a substrate; and a movable structure having an upper surface, a lower surface, a proximal portion, and a distal portion suspended above the substrate by at least one anchor homogenously formed from a dielectric material with a bottom portion having a bottom area of a bottom surface region attached to the substrate and an upper area of an upper surface region attached to the lower surface of the proximal portion of the movable structure, the at least one anchor further including a top portion having a lower area of a lower surface region attached to the upper surface of the proximal portion of the movable structure, wherein the lower surface region of the top portion and the upper surface region of the bottom portion are geometrically asymmetric. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. A semiconductor device comprising:
-
a substrate comprising a handle layer, an insulator layer over the handle layer, and a device layer over the handle layer in which a plurality of active semiconductor devices is formed; and a microstructure integrally formed on the substrate, the microstructure comprising; a movable structure having an upper surface, a lower surface, a proximal portion, and a distal portion suspended above the substrate by at least one anchor homogenously formed from a dielectric material with a bottom portion having a bottom area of a bottom surface region attached to the substrate and an upper area of an upper surface region attached to the lower surface of the proximal portion of the movable structure, the at least one anchor further including a top portion having a lower area of a lower surface region attached to the upper surface of the proximal portion of the movable structure, wherein the lower surface region of the top portion and the upper surface region of the bottom portion are geometrically asymmetric. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
-
-
27. A microstructure device comprising:
-
a substrate; and a movable structure having an upper surface, a lower surface, a proximal portion, and a distal portion suspended above the substrate by at least one anchor with a continuous structure formed from a dielectric material with a bottom portion having a bottom area of a bottom surface region attached to the substrate and an upper area of an upper surface region attached to the lower surface of the proximal portion of the movable structure, the at least one anchor further including a top portion having a lower area of a lower surface region attached to the upper surface of the proximal portion of the movable structure, wherein the lower surface region of the top portion and the upper surface region of the bottom portion are geometrically asymmetric.
-
Specification