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Microactuator, optical device and exposure apparatus, and device manufacturing method

  • US 8,570,632 B2
  • Filed: 04/12/2011
  • Issued: 10/29/2013
  • Est. Priority Date: 07/06/2006
  • Status: Active Grant
First Claim
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1. A microactuator that drives a driven body, the microactuator comprising:

  • a support member havinga pair of elastic sections,a coupling section that couples the elastic sections, anda connecting section that connects the coupling section and the driven body together; and

    a pair of drive mechanisms that are arranged respectively corresponding to the pair of the elastic sections, wherein each drive mechanism of the pair of the drive mechanisms transforms the corresponding elastic section to thereby change at least one of an attitude and an altitude of the driven body,wherein the connecting section is a single connecting section that connects the coupling section and the driven body together so that the driven body is supported at only one point.

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