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System, method and apparatus for generating plasma

  • US 8,575,843 B2
  • Filed: 05/29/2009
  • Issued: 11/05/2013
  • Est. Priority Date: 05/30/2008
  • Status: Active Grant
First Claim
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1. A plasma-generating device, comprising:

  • a housing including a passage defined therein configured to direct a flow of an ionizable gas therethrough;

    an electrode in communication with the ionizable gas flowing through the passage of the housing; and

    a resonant circuit including a capacitor and an inductor connected together in series, the resonant circuit having a resonance frequency and electrically coupled to the electrode; and

    a driver network configured to generate an AC signal having an excitation frequency substantially matching the resonance frequency of the resonant circuit, wherein the driver network provides the AC signal to the resonant circuit to excite the ionizable gas flowing through the passage of the housing to a plasma.

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