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Low temperature CNT growth using gas-preheat method

  • US 8,580,342 B2
  • Filed: 02/26/2010
  • Issued: 11/12/2013
  • Est. Priority Date: 02/27/2009
  • Status: Active Grant
First Claim
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1. A method comprising the steps of:

  • providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes (CNTs);

    passing a substrate through the growth chamber;

    heating an inert gas to a temperature exceeding a second temperture; and

    mixing a feed gas comprising a carbon with the heated inert gas to create a pre-heated mixture of the feed gas and the inert gas that has a temperature of at least the second temperature, wherein the second temperature is sufficient to dissociate at least some of the feed gas into free carbon radicals; and

    introducing the pre-heated mixture of feed gas and inert gas into the growth chamber wherein the free carbon radicals initiate formation of CNTs on the substrate.

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