Low temperature CNT growth using gas-preheat method
First Claim
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1. A method comprising the steps of:
- providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes (CNTs);
passing a substrate through the growth chamber;
heating an inert gas to a temperature exceeding a second temperture; and
mixing a feed gas comprising a carbon with the heated inert gas to create a pre-heated mixture of the feed gas and the inert gas that has a temperature of at least the second temperature, wherein the second temperature is sufficient to dissociate at least some of the feed gas into free carbon radicals; and
introducing the pre-heated mixture of feed gas and inert gas into the growth chamber wherein the free carbon radicals initiate formation of CNTs on the substrate.
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Abstract
A method for synthesizing carbon nanotubes (CNT) comprises the steps of providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes; and passing a substrate through the growth chamber; and introducing a feed gas into the growth chamber pre-heated to a second temperature sufficient to dissociate at least some of the feed gas into at least free carbon radicals to thereby initiate formation of carbon nanotubes onto the substrate.
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10 Claims
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1. A method comprising the steps of:
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providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes (CNTs); passing a substrate through the growth chamber; heating an inert gas to a temperature exceeding a second temperture; and mixing a feed gas comprising a carbon with the heated inert gas to create a pre-heated mixture of the feed gas and the inert gas that has a temperature of at least the second temperature, wherein the second temperature is sufficient to dissociate at least some of the feed gas into free carbon radicals; and introducing the pre-heated mixture of feed gas and inert gas into the growth chamber wherein the free carbon radicals initiate formation of CNTs on the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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