Semiconductor memory device
First Claim
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1. A semiconductor memory device comprising:
- a first conductive line;
a second conductive line crossing over the first conductive line;
a resistance variation part disposed at a position in which the second conductive line intersects with the first conductive line and electrically connected to the first conductive line and the second conductive line;
a mechanical switch disposed between the resistance variation part and the second conductive line, wherein the mechanical switch includes a nanotube;
a conductive pad disposed between the resistance variation part and the second conductive line and having an upper portion on which the nanotube is disposed; and
an interlayer dielectric film which is disposed on only a portion of an upper surface of the conductive pad and which covers side walls of the first conductive line, the resistance variation part, and the conductive pad, wherein the interlayer dielectric film has a first opening art partially exposing the upper surface of the conductive pad, and wherein the nanotube is disposed in the first opening part.
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Abstract
A semiconductor memory device includes a first conductive line, a second conductive line crossing over the first conductive line, a resistance variation part disposed at a position in which the second conductive line intersects with the first conductive line and electrically connected to the first conductive line and the second conductive line and a mechanical switch disposed between the resistance variation part and the second conductive line. The mechanical switch includes a nanotube.
34 Citations
20 Claims
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1. A semiconductor memory device comprising:
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a first conductive line; a second conductive line crossing over the first conductive line; a resistance variation part disposed at a position in which the second conductive line intersects with the first conductive line and electrically connected to the first conductive line and the second conductive line; a mechanical switch disposed between the resistance variation part and the second conductive line, wherein the mechanical switch includes a nanotube; a conductive pad disposed between the resistance variation part and the second conductive line and having an upper portion on which the nanotube is disposed; and an interlayer dielectric film which is disposed on only a portion of an upper surface of the conductive pad and which covers side walls of the first conductive line, the resistance variation part, and the conductive pad, wherein the interlayer dielectric film has a first opening art partially exposing the upper surface of the conductive pad, and wherein the nanotube is disposed in the first opening part. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 19)
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9. A semiconductor memory device comprising:
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a buffer film disposed on a semiconductor substrate; a first conductive line extending across the semiconductor substrate and disposed on the buffer layer; a resistance variation part disposed on the first conductive line; a conductive pad disposed on the resistance variation part; an interlayer dielectric film which is disposed on only a portion of an upper surface of the conductive pad and covering sidewalls of the first conductive line, the resistance variation part and the conductive pad, wherein the interlayer dielectric film includes a first opening part that partially exposes the upper surface of the conductive pad; a second conductive line that extends on the interlayer dielectric film and crosses an upper side of the first conductive line; and a mechanical switch comprising a plurality of carbon nanotubes which are vertically elongated and disposed on the upper surface of the conductive pad exposed by the first opening part. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 20)
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Specification