Functional device array with self-aligned electrode structures and fabrication methods thereof

• US 8,582,040 B2
• Filed: 11/20/2008
• Issued: 11/12/2013
• Est. Priority Date: 06/10/2008
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Hou, Chih Sheng, Hou, Wei-Hsin
• Primary Examiner(s): CALEY, MICHAEL H
• Application Number:
  US12/274,762
• Publication Number:
  US 20090303400A1
• Time in Patent Office: 1,818 Days
• Field of Search: 178/18.03, 178/18.05, 178/18.06, 349/12
• US Class Current: 349/12
• CPC Class Codes: G06F 3/0412 Digitisers structurally integrated in a display
• CPC Class Codes: G06F 3/04144 using an array of force sensing means position sensing using the local deformation of sensor cells G06F3/0447
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes

Abstract

A functional device array with self-aligned electrode structures and fabrication methods thereof are presented. The functional device array includes a transparent substrate. A patterned lower electrode array is disposed on the transparent substrate. A spacer structure is disposed overlying the transparent substrate and located between the patterned lower electrodes self-aligned therewith. A functional structure layer is disposed in an array of pixel regions defined by the spacer structure. A patterned upper substrate is disposed on the functional structure layer corresponding to each of the pixel regions, and a passivation layer is disposed on the patterned upper electrode covering the functional device array.

Claims

1. A sensor device array with self-aligned electrode structures, comprising:

a transparent substrate;

a lower electrode array comprising lower electrodes disposed on the transparent substrate;

a plurality of spacer structures disposed on the transparent substrate, at a gap between the lower electrodes, and self-aligned with the lower electrode array;

a functional structure disposed on a pixel region array defined by the plurality of spacer structures, wherein the functional structure has portions in pixel regions of the pixel region array, and neighboring portions of the functional structure are connected over the spacer structures;

a patterned upper electrode disposed directly on the functional structure corresponding to the pixel region array thereby forming a direct electrical connection; and

a passivation layer disposed on the patterned upper electrode covering the functional structure, wherein the functional structure includes a layer of polymeric pressure sensitive material filled into cavities formed by the spacer structures.

2. The sensor device array as claimed in claim 1, wherein the transparent substrate comprises transparent polyetheretherketone, polyethylene naphthalate, blocked isocyanates, silicone based elastomers, polyamides, polyimides, aromatic fluorine polyesters, polyethersulfone, polysulfones, polyacrylates, polycarbonates, poly (styrene-diene) block copolymers, poly (vinyl halides), polyurethanes, poly (urethane acrylates), poly (urethane methacrylates), poly (dimethyl siloxanes), polyetherimides, polymethacrylates, polyolefins, poly (ethylene-acrylate) copolymers, poly (ethylene-methacrylate) copolymers, polyethylene terephthalate, polynaphthalene terephthalate, polydienes, or ionomers.

3. The sensor device array as claimed in claim 1, wherein each of the patterned lower electrodes is circular and is longitudinally connected as a peapod pattern extending to contact pads on a peripheral region.

4. The sensor device array as claimed in claim 1, wherein each of the patterned lower electrodes is square and is longitudinally cross-connected as a zigzag pattern extending to contact pads on a peripheral region.

5. The sensor device array as claimed in claim 1, wherein edges of the plurality of spacer structures are completely aligned with the patterned lower electrodes.

6. The sensor device array as claimed in claim 1, wherein the functional device array comprises a sensor device array.

7. The sensor device array as claimed in claim 6, wherein the functional structure comprises a layer of pressure sensitive conductive, dielectric, piezoelectric, inductive, or magnetic material.

8. The sensor device array as claimed in claim 7, wherein the layer of conductive pressure-sensitive paste comprises a polydimethylsiloxane (PDMS) layer, a polyurethane layer, an acrylic rubber layer, a natural rubber layer, a nitrile rubber layer, a styrene butadiene layer, a butadiene acrylonitrile layer, an isoprene butylene butyl layer, a fluoronated hydrocarbon layer, an ethylene vinyl acetate layer, an ethylene propylene diene layer, an ethylene propylene layer, a polybutadiene layer, a polychloroprene layer, a epichlorohydrin layer, a chlorosulphonated polyethylene layer, a polyethylene terephthalate layer or above combining forms.

9. The sensor device array as claimed in claim 1, wherein the functional device array comprises a display device array.

10. The sensor device array as claimed in claim 9, wherein the functional structure is a layer of a display medium comprising a cholesteric liquid crystal, a polymer network liquid crystal, a polymer dispersed liquid crystal, an electrophoretic medium, fast response liquid phase powders, an electrochromic medium, a guest-host liquid crystal, and a nano-particle dispersed liquid crystal.

11. The sensor device array as claimed in claim 9, wherein the patterned upper electrode is a transparent conductive oxide comprising an indium tin oxide (ITO), an aluminum doped zinc oxide, a stibium tin oxide, a gallium doped zinc oxide and carbon nanotube, and conductive polymer.

12. The sensor device array as claimed in claim 1, wherein the functional device array comprises a touch controlled device array.

13. The sensor device array as claimed in claim 12, wherein the functional structure is a pressure-sensitive layer comprising a conductive, dielectric, piezoelectric, inductive, or magnetic material.

14. The sensor device array as claimed in claim 12, further comprising a gap between the patterned lower electrode array and the patterned upper electrode.

15. The sensor device array as claimed in claim 12, further comprising an additional pressure-sensitive layer disposed on the patterned lower electrode array.

16. The sensor device array as claimed in claim 1, wherein the lower electrode array is a patterned lower electrode array.

17. The functional device array as claimed in claim 1, wherein the lower electrode array is a patterned lower electrode array.

18. The sensor device array as claimed in claim 1, wherein the functional structure directly contacts the lower electrode array.

19. The sensor device array as claimed in claim 1, wherein the functional structure comprises segments and bottom parts of the segments are separated from each other by the spacer structures.

20. The sensor device array as claimed in claim 1, wherein the polymeric pressure sensitive material is a polydimethylsiloxanes (PDMS) layer.

21. The sensor device array as claimed in claim 1, wherein the polymeric pressure sensitive material extends over the spacer structures to join with polymeric pressure sensitive material in adjacent cavities.

22. A sensor device structure with self-aligned electrode structures, comprising:

a transparent substrate;

a lower electrode array on the transparent substrate;

spacer structures comprising a negative photoresist disposed on the transparent substrate, at gaps between lower electrodes of the lower electrode array, and self-aligned with the lower electrode array;

a functional structure on a pixel region array defined by the plurality of spacer structures, wherein the functional structure has portions in pixel regions of the pixel region array, and neighboring portions of the functional structure are connected over the spacer structures;

a patterned upper electrode disposed directly on the functional structure corresponding to the pixel region array thereby forming a direct electrical connection; and

a passivation layer on the patterned upper electrode covering the functional structure, wherein the functional structure includes a layer of polymeric pressure sensitive material filled into cavities formed by the spacer structures.

23. The sensor device structure as claimed in claim 22, wherein the transparent substrate comprises a transparent polyethylene terephthalate (PET), polyetheretherketone, polyethylene naphthalate, blocked isocyanates, silicone based elastomers, polyamides, polyimides, aromatic fluorine polyesters, polyethersulfone, polysulfones, polyacrylates, polycarbonates, poly (styrene-diene) block copolymers, poly (vinyl halides), polyurethanes, poly (urethane acrylates), poly (urethane methacrylates), poly (dimethyl siloxanes), polyetherimides, polymethacrylates, polyolefins, poly (ethylene-acrylate) copolymers, poly (ethylene-methacrylate) copolymers, polyethylene terephthalate, polynaphthalene terephthalate, polydienes, or ionomer substrate.

24. The sensor device structure as claimed in claim 22, wherein each of the patterned lower electrodes is circular and is longitudinally connected as a peapod pattern extending to contact pads on a peripheral region.

25. The sensor device structure as claimed in claim 22, wherein each of the patterned lower electrodes is square and is longitudinally cross-connected as a zigzag pattern extending to contact pads on a peripheral region.

26. The sensor device structure as claimed in claim 22, wherein formation of the functional structure on a pixel region array is performed by screen-printing the functional structure.

27. The sensor device structure as claimed in claim 22, wherein formation of the functional structure on a pixel region array comprises printing a display medium.

28. The sensor device structure as claimed in claim 27, wherein the display medium comprises a cholesteric liquid crystal, a polymer network liquid crystal, a polymer dispersed liquid crystal, an electrophoretic medium, fast response liquid phase powders, a electrochromic medium, a guest-host liquid crystal, and a nano-particle dispersed liquid crystal.

29. The sensor device structure as claimed in claim 22, wherein the patterned upper electrode comprises a transparent conductive oxide comprising an indium tin oxide (ITO), an aluminum doped zinc oxide, a stibium tin oxide, a gallium doped zinc oxide, carbon nanotube, and conductive polymer.

30. The sensor device structure as claimed in claim 22, wherein the lower electrode array is a patterned lower electrode array.

31. The sensor device structure as claimed in claim 22, wherein the functional structure directly contacts the lower electrode array.

32. The sensor device structure as claimed in claim 22, wherein the functional structure comprises segments and bottom parts of the segments are separated from each other by the spacer structures.

33. The sensor device structure as claimed in claim 22, wherein the polymeric pressure sensitive material is a polydimethylsiloxanes (PDMS) layer.

34. The sensor device structure as claimed in claim 22, wherein the polymeric pressure sensitive material extends over the spacer structures to join with polymeric pressure sensitive material in adjacent cavities.