MEMS microphone

• US 8,582,788 B2
• Filed: 02/08/2006
• Issued: 11/12/2013
• Est. Priority Date: 02/24/2005
• Status: Active Grant

• Current Assignee: TDK Corporation
• Original Assignee: Epcos AG (TDK Corporation)
• Inventors: Leidl, Anton, Pahl, Wolfgang, Wolff, Ulrich
• Primary Examiner(s): Le, Thao
• Assistant Examiner(s): GORDON, MATTHEW E
• Application Number:
  US11/816,969
• Publication Number:
  US 20080267431A1
• Time in Patent Office: 2,834 Days
• Field of Search: 381/173, 381/174, 381/190, 381/355, 381/361, 381/369
• US Class Current: 381/173
• CPC Class Codes: H04R 1/283 using a passive diaphragm
• CPC Class Codes: H04R 1/2838 of the bandpass type
• CPC Class Codes: H04R 17/02 Microphones
• CPC Class Codes: H04R 2201/003 Mems transducers or their use of the electrostatic type H04R19/005

Abstract

A microphone includes a first diaphragm and a second diaphragm coupled to the first diaphragm by a closed air volume. The first diaphragm and the second diaphragm each constitutes a piezoelectric diaphragm. The first diaphragm and the second diaphragm are electrically coupled so that movement of the first diaphragm causes movement of the second diaphragm.

Claims

1. A microphone comprising:

a first diaphragm that is passive and thus not responsive to an electrical signal;

a driver to generate a signal in response to displacement of the first diaphragm; and

a second diaphragm coupled to the first diaphragm by a closed air volume, the second diaphragm being active and being movable in response to the signal generated by the driver;

wherein the first diaphragm and the second diaphragm each comprises a piezoelectric diaphragm.

2. The microphone of claim 1, further comprising

structure that defines a first cavity, the structure having a first opening and a second opening that lead to the first cavity;

wherein the first diaphragm is over the first opening and the second diaphragm is over the second opening, thereby defining the closed air volume;

wherein the second diaphragm is controlled by the signal so that, if the first diaphragm moves towards an interior of the first cavity, the second diaphragm moves away from the interior of the first cavity; and

wherein a volume displacement resulting from movement of the second diaphragm is between 50% and 100% of a volume displacement resulting from movement of the first diaphragm.

3. The microphone of claim 1, wherein movement of the first diaphragm and movement of the second diaphragm occur in a same direction relative to the closed air volume.

4. The microphone of claim 3, further comprising

structure that defines a first cavity, the structure having a first opening and a second opening that lead to the first cavity;

wherein the first diaphragm is over the first opening and the second diaphragm is over the second opening, thereby defining the closed air volume; and

wherein a volume displacement resulting from movement of the second diaphragm is between 50% and 100% of a volume displacement resulting from movement of the first diaphragm.

5. The microphone of claim 1, wherein the first diaphragm and the second diaphragm are not opposite each other relative to the closed air volume.

6. The microphone of claim 5, further comprising

structure that defines a first cavity, the structure having a first opening and a second opening that lead to the first cavity;

wherein the first diaphragm is over the first opening and the second diaphragm is over the second opening, thereby defining the closed air volume;

wherein the second diaphragm is controlled by the signal so that, if the first diaphragm moves towards an interior of the first cavity, the second diaphragm moves away from the interior of the first cavity; and

wherein a volume displacement resulting from movement of the second diaphragm is between 50% and 100% of a volume displacement resulting from movement of the first diaphragm.

7. The microphone of claim 1, wherein the closed air volume functions as a back volume;

and

wherein structure that defines the closed air volume includes a ventilation opening to balance an internal pressure of the closed air volume with an external pressure outside of the microphone, where pressure balancing occurs over a time that exceeds a period of an acoustic signal applied to the first diaphragm.

8. A microphone comprising:

a first diaphragm coupled to a closed air volume, the first diaphragm being passive and thus movable in response to pressure but not responsive to an electrical signal;

a second diaphragm being active and thus movable in response to a control signal, the second diaphragm being movable in response to the control signal to dampen an oscillation amplitude of the first diaphragm; and

a driver to generate the control signal in response to movement of the first diaphragm.

9. The microphone of claim 8, wherein changes in pressure on both sides of the first diaphragm are essentially equal in magnitude.

10. The microphone of claim 8, wherein the control signal is for controlling the second diaphragm so that displacement of the first diaphragm results in displacement of the second diaphragm so as to produce a change in pressure in the closed air volume that substantially counteracts the pressure and thereby reduces displacement of the first diaphragm by 50%-100%.

11. The microphone of claim 8, wherein the second diaphragm is coupled to the closed air volume;

and

wherein the first diaphragm is connected to a first wall and the second diaphragm is connected to a second wall, the first and second walls being part of a structure that houses the closed air volume.

12. The microphone of claim 11, wherein the first and second walls face each other.

13. The microphone of claim 11, wherein the first and second walls are substantially perpendicular.

15. The microphone of claim 8, wherein the second diaphragm is coupled to the closed air volume;

and

wherein the first and second diaphragms have substantially same masses.

16. The microphone of claim 8, wherein the second diaphragm is coupled to the closed air volume;

and

wherein the first and second diaphragms have substantially same shapes.

17. The microphone of claim 8, further comprising:

a chamber that includes a sound inlet opening that leads to an exterior of the microphone, the chamber being adjacent to the first diaphragm and isolated from the closed air volume.

18. The microphone of claim 8, wherein the second diaphragm is coupled to the closed air volume;

and

wherein the driver comprises a control circuit to tap an electrical signal from the first diaphragm and to output the control signal to the second diaphragm to produce a displacement that affects internal pressure in the closed air volume and thereby reduces displacement of the first diaphragm.

19. The microphone of claim 18, wherein the control circuit comprises an amplifier.

20. The microphone of claim 8, wherein the second diaphragm is coupled to the closed air volume;

and

wherein a structure housing the closed air volume comprises at least one ventilation opening to an exterior of the microphone, the ventilation opening being is smaller than cross-sectional areas of the first and second diaphragms.

21. The microphone of claim 20, wherein the ventilation opening is in the first diaphragm or in a wall of the structure.

22. The microphone of one of claims 8, wherein the second diaphragm is coupled to the closed air volume;

and

wherein the closed air volume is a first closed air volume, and the second diaphragm is coupled to a second closed air volume on a side of the second diaphragm that is different from a side of the second diaphragm that faces the first closed air volume.

23. The microphone of claim 8, wherein the second diaphragm is coupled to the closed air volume;

and

wherein the driver comprises an electrical circuit connected to the first diaphragm and/or to the second diaphragm to reduce feedback oscillations.

14. The microphone of 8, wherein the second diaphragm is coupled to the closed air volume;

and

wherein the first and second diaphragms are arranged along a same wall that is part of a structure that houses the closed air volume.